Abstract
The ultrasonic correlation system was improved to detect a displacement which is much smaller than the wave length of sound, by shifting the phase of the reference wave with respect to the acoustic signal. To investigate the range resolution of the new system, micrometer order displacement was measured using MHz-range ultrasonic waves. Results obtained using the new system show good agreement with the values set by the precision micrometer stage. Range resolution better than λ/300 (1 μm) has been achieved. As an application of the system, the surface topography was also investigated using a 5 MHz focused ultrasonic transducer in the 2-dimensional scanning mode. Surface displacement smaller than λ/10 was successfully imaged.
| Original language | English |
|---|---|
| Pages (from-to) | 3177-3179 |
| Number of pages | 3 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 35 |
| Issue number | 5 B |
| DOIs | |
| Publication status | Published - 1996 |
| Externally published | Yes |
Keywords
- Phase shift method
- Range resolution
- Surface topography
- Ultrasonic correlation method
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)