Measurement of Surface State Distributions in MOS Diodes with a Simple DLTS System

Teruaki Katsube, Koichi Kakimoto, Masashi Hara

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	2307-2308
Number of pages	2
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	19
Issue number	11
DOIs	https://doi.org/10.1143/JJAP.19.2307
Publication status	Published - 1980
Externally published	Yes

ASJC Scopus subject areas

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title = "Measurement of Surface State Distributions in MOS Diodes with a Simple DLTS System",

author = "Teruaki Katsube and Koichi Kakimoto and Masashi Hara",

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AU - Kakimoto, Koichi

AU - Hara, Masashi

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