Measurements of image quality and surface shape of microlens arrays for Shack-Hartmann wavefront sensors

Koki Terao, Masayuki Akiyama, Shin Oya

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)


We present the results of the evaluation of the ensquared energy of eight commercially available and custom made Microlens arrays (MLAs) with different focal length Plano-Convex microlens. The highest efficiency is observed with a 300 µm pitch MLA with no AR-coating and square apertures, which show 79% light ensquared within the first dark ring compared to the uniform illumination of the sub-aperture. To quantitatively explain the observed difference in the ensquared energy, we measured the surface shape of these MLAs using a laser interferometer. The comparison between the ensquared energy and the surface shape inferred that the lower ensquared energy of a MLA than the other MLAs with same 300 µm pitch can be explained with the deviation of the ideal shape at the outer part of the each lens.

Original languageEnglish
Title of host publicationAdaptive Optics Systems VII
EditorsLaura Schreiber, Dirk Schmidt, Elise Vernet
ISBN (Electronic)9781510636835
Publication statusPublished - 2020
EventAdaptive Optics Systems VII 2020 - Virtual, Online, United States
Duration: 2020 Dec 142020 Dec 22

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceAdaptive Optics Systems VII 2020
Country/TerritoryUnited States
CityVirtual, Online


  • Microlens array


Dive into the research topics of 'Measurements of image quality and surface shape of microlens arrays for Shack-Hartmann wavefront sensors'. Together they form a unique fingerprint.

Cite this