TY - JOUR
T1 - Mechanical polarization modulator using micro-turbo machinery for Fourier transform infrared spectroscopy
AU - Tanaka, Shuji
AU - Hara, Motoaki
AU - Esashi, Masayoshi
N1 - Funding Information:
This work was supported by Industrial Technology Research Grant Program in 2000–2001 from the New Energy and Industrial Technology Development Organization (NEDO) of Japan, and partly by Research for the Future Program from the Japan Society for the Promotion of Science (JSPS). We used Venture Business Laboratory, Tohoku University.
PY - 2002/2/28
Y1 - 2002/2/28
N2 - This paper describes the development of a mechanical polarization modulator using micro-turbo machinery for double modulation Fourier transform infrared spectroscopy (FT-IR). The modulator has a Au-Cr wire grid polarizer with a pitch of 4 μm on the backside of a φ 5 mm silicon turbine rotor. The modulator is composed of a top Pyrex glass layer and three n-type silicon layers, which were fabricated mainly by photolithography and deep reactive ion etching (deep RIE). The rotational speed was measured using nitrogen as a driving gas. This confirmed the rotational speed of about 18,000 rpm, when the volume flow rate was 8.8 1/min. The higher volume flow rate broke the edge of an air port in the second layer. We also confirmed the polarization of infrared light using a broadband infrared lamp and a fixed polarizer. The polarization was modulated according to the rotor rotation; however, the signal/noise ratio was low because of the wide pitch of the wire grid polarizer.
AB - This paper describes the development of a mechanical polarization modulator using micro-turbo machinery for double modulation Fourier transform infrared spectroscopy (FT-IR). The modulator has a Au-Cr wire grid polarizer with a pitch of 4 μm on the backside of a φ 5 mm silicon turbine rotor. The modulator is composed of a top Pyrex glass layer and three n-type silicon layers, which were fabricated mainly by photolithography and deep reactive ion etching (deep RIE). The rotational speed was measured using nitrogen as a driving gas. This confirmed the rotational speed of about 18,000 rpm, when the volume flow rate was 8.8 1/min. The higher volume flow rate broke the edge of an air port in the second layer. We also confirmed the polarization of infrared light using a broadband infrared lamp and a fixed polarizer. The polarization was modulated according to the rotor rotation; however, the signal/noise ratio was low because of the wide pitch of the wire grid polarizer.
KW - Double modulation FT-IR
KW - Micro-turbo machinery
KW - Polarization modulator
KW - Wire grid polarizer
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U2 - 10.1016/S0924-4247(01)00760-9
DO - 10.1016/S0924-4247(01)00760-9
M3 - Article
AN - SCOPUS:0037186183
SN - 0924-4247
VL - 96
SP - 215
EP - 222
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
IS - 2-3
ER -