Mechanism of resistivity decrease in networked-nanographite wires for multi-layer graphene interconnects

Motonobu Sato; Shuichi Ogawa; Manabu Inukai; Eiji Ikenaga; Takayuki Muro; Yuji Takakuwa; Mizuhisa Nihei; Naoki Yokoyama

doi:10.1109/IITC.2011.5940268

Mechanism of resistivity decrease in networked-nanographite wires for multi-layer graphene interconnects

Motonobu Sato, Shuichi Ogawa, Manabu Inukai, Eiji Ikenaga, Takayuki Muro, Yuji Takakuwa, Mizuhisa Nihei, Naoki Yokoyama

Micro System Integration Center (μSIC)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We investigated the mechanism of resistivity decrease in networked-nanographite wires. The wires had no failure during over 200 hours under a current density of 5E5A/cm² at about 400C. However, their resistivity decreased gradually owing to thermal stress. Raman and x-ray photoelectron spectroscopy revealed that the decrease in resistivity can be attributed to an increase in sp² bonding corresponding to the formation of a graphene sheet. It is important to clarify the mechanism for the decrease in resistivity, not only to improve thermal stability but also to obtain lower resistivity in carbon interconnects.

Original language	English
Title of host publication	2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011
DOIs	https://doi.org/10.1109/IITC.2011.5940268
Publication status	Published - 2011
Event	2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011 - Dresden, Germany Duration: 2011 May 8 → 2011 May 12

Publication series

Name	2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011

Conference

Conference	2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011
Country/Territory	Germany
City	Dresden
Period	11/5/8 → 11/5/12

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10.1109/IITC.2011.5940268

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Sato, M., Ogawa, S., Inukai, M., Ikenaga, E., Muro, T., Takakuwa, Y., Nihei, M., & Yokoyama, N. (2011). Mechanism of resistivity decrease in networked-nanographite wires for multi-layer graphene interconnects. In 2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011 Article 5940268 (2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011). https://doi.org/10.1109/IITC.2011.5940268

Sato, Motonobu ; Ogawa, Shuichi ; Inukai, Manabu et al. / Mechanism of resistivity decrease in networked-nanographite wires for multi-layer graphene interconnects. 2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011. 2011. (2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011).

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title = "Mechanism of resistivity decrease in networked-nanographite wires for multi-layer graphene interconnects",

abstract = "We investigated the mechanism of resistivity decrease in networked-nanographite wires. The wires had no failure during over 200 hours under a current density of 5E5A/cm2 at about 400C. However, their resistivity decreased gradually owing to thermal stress. Raman and x-ray photoelectron spectroscopy revealed that the decrease in resistivity can be attributed to an increase in sp2 bonding corresponding to the formation of a graphene sheet. It is important to clarify the mechanism for the decrease in resistivity, not only to improve thermal stability but also to obtain lower resistivity in carbon interconnects.",

author = "Motonobu Sato and Shuichi Ogawa and Manabu Inukai and Eiji Ikenaga and Takayuki Muro and Yuji Takakuwa and Mizuhisa Nihei and Naoki Yokoyama",

year = "2011",

doi = "10.1109/IITC.2011.5940268",

language = "English",

isbn = "9781457705038",

series = "2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011",

booktitle = "2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011",

note = "2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011 ; Conference date: 08-05-2011 Through 12-05-2011",

}

Sato, M, Ogawa, S, Inukai, M, Ikenaga, E, Muro, T, Takakuwa, Y, Nihei, M & Yokoyama, N 2011, Mechanism of resistivity decrease in networked-nanographite wires for multi-layer graphene interconnects. in 2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011., 5940268, 2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011, 2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011, Dresden, Germany, 11/5/8. https://doi.org/10.1109/IITC.2011.5940268

Mechanism of resistivity decrease in networked-nanographite wires for multi-layer graphene interconnects. / Sato, Motonobu; Ogawa, Shuichi; Inukai, Manabu et al.
2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011. 2011. 5940268 (2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Mechanism of resistivity decrease in networked-nanographite wires for multi-layer graphene interconnects

AU - Sato, Motonobu

AU - Ogawa, Shuichi

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AU - Muro, Takayuki

AU - Takakuwa, Yuji

AU - Nihei, Mizuhisa

AU - Yokoyama, Naoki

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N2 - We investigated the mechanism of resistivity decrease in networked-nanographite wires. The wires had no failure during over 200 hours under a current density of 5E5A/cm2 at about 400C. However, their resistivity decreased gradually owing to thermal stress. Raman and x-ray photoelectron spectroscopy revealed that the decrease in resistivity can be attributed to an increase in sp2 bonding corresponding to the formation of a graphene sheet. It is important to clarify the mechanism for the decrease in resistivity, not only to improve thermal stability but also to obtain lower resistivity in carbon interconnects.

AB - We investigated the mechanism of resistivity decrease in networked-nanographite wires. The wires had no failure during over 200 hours under a current density of 5E5A/cm2 at about 400C. However, their resistivity decreased gradually owing to thermal stress. Raman and x-ray photoelectron spectroscopy revealed that the decrease in resistivity can be attributed to an increase in sp2 bonding corresponding to the formation of a graphene sheet. It is important to clarify the mechanism for the decrease in resistivity, not only to improve thermal stability but also to obtain lower resistivity in carbon interconnects.

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BT - 2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011

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Sato M, Ogawa S, Inukai M, Ikenaga E, Muro T, Takakuwa Y et al. Mechanism of resistivity decrease in networked-nanographite wires for multi-layer graphene interconnects. In 2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011. 2011. 5940268. (2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization, IITC/MAM 2011). doi: 10.1109/IITC.2011.5940268

Mechanism of resistivity decrease in networked-nanographite wires for multi-layer graphene interconnects

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