MEMS-based thin palladium membrane microreactors

S. Y. Ye; S. Tanaka; M. Esashi; S. Hamakawa; T. Hanaoka; F. Mizukami

doi:10.1117/12.667851

MEMS-based thin palladium membrane microreactors

S. Y. Ye, S. Tanaka, M. Esashi, S. Hamakawa, T. Hanaoka, F. Mizukami

ENG - Robotics

Research output: Contribution to journal › Conference article › peer-review

3 Citations (Scopus)

Abstract

We microfabricated a MEMS (Micro Electro Mechanical System) based thin palladium (Pd) membrane microreactor with oxidized porous silicon (PS) support. The membranes were characterized by permeation experiments with hydrogen, nitrogen, and helium at temperature ranging from 200°C to 250°C. The hydrogen flux through the Pd membrane with a thickness of 340 nm was 0.112 mol m^-2 s^-1 at 250°C and a partial pressure difference of 110 kPa. H₂/N₂ and H₂/He selectivity was about 46 and 10 at 250°C, respectively. The thermal isolation of the Pd membrane, which was heated by an integrated microheater, was realized by using the oxidized PS. We also carried out the hydrogenation of 1-butene at 250°C using the developed microreactor. The results of long term test of about three months suggest that Pd membrane microreactor has a potential to be used in practical applications.

Original language	English
Article number	603207
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6032
DOIs	https://doi.org/10.1117/12.667851
Publication status	Published - 2006
Event	ICO20: MEMS, MOEMS, and NEMS - Changchun, China Duration: 2005 Aug 21 → 2005 Aug 26

Keywords

Hydrogen permeation
Hydrogenation/dehydrogenation reaction
Micro electromechanical system (mems)
Palladium membrane
Porous silicon, microreactor

Access to Document

10.1117/12.667851

Cite this

@article{c949090e4bed48cead4b3689ecef926d,

title = "MEMS-based thin palladium membrane microreactors",

abstract = "We microfabricated a MEMS (Micro Electro Mechanical System) based thin palladium (Pd) membrane microreactor with oxidized porous silicon (PS) support. The membranes were characterized by permeation experiments with hydrogen, nitrogen, and helium at temperature ranging from 200°C to 250°C. The hydrogen flux through the Pd membrane with a thickness of 340 nm was 0.112 mol m-2 s-1 at 250°C and a partial pressure difference of 110 kPa. H2/N2 and H2/He selectivity was about 46 and 10 at 250°C, respectively. The thermal isolation of the Pd membrane, which was heated by an integrated microheater, was realized by using the oxidized PS. We also carried out the hydrogenation of 1-butene at 250°C using the developed microreactor. The results of long term test of about three months suggest that Pd membrane microreactor has a potential to be used in practical applications.",

keywords = "Hydrogen permeation, Hydrogenation/dehydrogenation reaction, Micro electromechanical system (mems), Palladium membrane, Porous silicon, microreactor",

author = "Ye, {S. Y.} and S. Tanaka and M. Esashi and S. Hamakawa and T. Hanaoka and F. Mizukami",

year = "2006",

doi = "10.1117/12.667851",

language = "English",

volume = "6032",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "ICO20: MEMS, MOEMS, and NEMS ; Conference date: 21-08-2005 Through 26-08-2005",

}

TY - JOUR

T1 - MEMS-based thin palladium membrane microreactors

AU - Ye, S. Y.

AU - Tanaka, S.

AU - Esashi, M.

AU - Hamakawa, S.

AU - Hanaoka, T.

AU - Mizukami, F.

PY - 2006

Y1 - 2006

N2 - We microfabricated a MEMS (Micro Electro Mechanical System) based thin palladium (Pd) membrane microreactor with oxidized porous silicon (PS) support. The membranes were characterized by permeation experiments with hydrogen, nitrogen, and helium at temperature ranging from 200°C to 250°C. The hydrogen flux through the Pd membrane with a thickness of 340 nm was 0.112 mol m-2 s-1 at 250°C and a partial pressure difference of 110 kPa. H2/N2 and H2/He selectivity was about 46 and 10 at 250°C, respectively. The thermal isolation of the Pd membrane, which was heated by an integrated microheater, was realized by using the oxidized PS. We also carried out the hydrogenation of 1-butene at 250°C using the developed microreactor. The results of long term test of about three months suggest that Pd membrane microreactor has a potential to be used in practical applications.

AB - We microfabricated a MEMS (Micro Electro Mechanical System) based thin palladium (Pd) membrane microreactor with oxidized porous silicon (PS) support. The membranes were characterized by permeation experiments with hydrogen, nitrogen, and helium at temperature ranging from 200°C to 250°C. The hydrogen flux through the Pd membrane with a thickness of 340 nm was 0.112 mol m-2 s-1 at 250°C and a partial pressure difference of 110 kPa. H2/N2 and H2/He selectivity was about 46 and 10 at 250°C, respectively. The thermal isolation of the Pd membrane, which was heated by an integrated microheater, was realized by using the oxidized PS. We also carried out the hydrogenation of 1-butene at 250°C using the developed microreactor. The results of long term test of about three months suggest that Pd membrane microreactor has a potential to be used in practical applications.

KW - Hydrogen permeation

KW - Hydrogenation/dehydrogenation reaction

KW - Micro electromechanical system (mems)

KW - Palladium membrane

KW - Porous silicon, microreactor

UR - http://www.scopus.com/inward/record.url?scp=33645227632&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33645227632&partnerID=8YFLogxK

U2 - 10.1117/12.667851

DO - 10.1117/12.667851

M3 - Conference article

AN - SCOPUS:33645227632

SN - 0277-786X

VL - 6032

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 603207

T2 - ICO20: MEMS, MOEMS, and NEMS

Y2 - 21 August 2005 through 26 August 2005

ER -

MEMS-based thin palladium membrane microreactors

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this