MEMS-based thin palladium membrane microreactors

S. Y. Ye, S. Tanaka, M. Esashi, S. Hamakawa, T. Hanaoka, F. Mizukami

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)


We microfabricated a MEMS (Micro Electro Mechanical System) based thin palladium (Pd) membrane microreactor with oxidized porous silicon (PS) support. The membranes were characterized by permeation experiments with hydrogen, nitrogen, and helium at temperature ranging from 200°C to 250°C. The hydrogen flux through the Pd membrane with a thickness of 340 nm was 0.112 mol m-2 s-1 at 250°C and a partial pressure difference of 110 kPa. H2/N2 and H2/He selectivity was about 46 and 10 at 250°C, respectively. The thermal isolation of the Pd membrane, which was heated by an integrated microheater, was realized by using the oxidized PS. We also carried out the hydrogenation of 1-butene at 250°C using the developed microreactor. The results of long term test of about three months suggest that Pd membrane microreactor has a potential to be used in practical applications.

Original languageEnglish
Article number603207
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2006
EventICO20: MEMS, MOEMS, and NEMS - Changchun, China
Duration: 2005 Aug 212005 Aug 26


  • Hydrogen permeation
  • Hydrogenation/dehydrogenation reaction
  • Micro electromechanical system (mems)
  • Palladium membrane
  • Porous silicon, microreactor


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