MEMS for plasmon control of optical metamaterials

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23 Citations (Scopus)


Metamaterials have attracted a great deal of attention as artificial electromagnetic materials having unique optical characteristics, and various innovative optical applications have been expected. Micro electromechanical systems (MEMS)-based reconfigurable metamaterials are candidate technologies for active optical control. In this paper, we focus on MEMS-based reconfigurable metamaterials operated in the optical region between visible and near-infrared wavelengths. A brief overview of static optical metamaterials and active optical metamaterials driven by MEMS actuators is presented. Moreover, points to be considered for a micromachining process of optical metamaterials are discussed with results of calculations.

Original languageEnglish
Article number7017492
Pages (from-to)137-146
Number of pages10
JournalIEEE Journal of Selected Topics in Quantum Electronics
Issue number4
Publication statusPublished - 2015 Jul 1


  • microelectromechanical systems
  • microfabrication
  • nanophotonics
  • optical metamaterials
  • plasmons


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