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MEMS for practical applications
Masayoshi Esashi
Micro System Integration Center (μSIC)
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Engineering
Microelectromechanical System
100%
Rotational
25%
Capacitive
25%
Pressure Probe
25%
Feedthrough
25%
Silicon Material
25%
Practical Application
25%
Sensor
25%
Molding
25%
Silicon
25%