MEMS tunable optical filter using auto-cloned photonic crystal

S. Nagasawa; T. Onuki; Y. Ohtera; Hiroki Kuwano

MEMS tunable optical filter using auto-cloned photonic crystal

S. Nagasawa, T. Onuki, Y. Ohtera, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper proposes a novel MEMS tunable optical filter (TOP) using an auto-cloned photonic crystal (PhC). The auto-cloning method has great gains to fabricate multi-dimensional PhCs in productivity, flexibility and robustness. A two-dimensional PhC was fabricated by stacking Mb₂O₅ and SiO₂ layers alternately keeping nano-scale periodic corrugations (190nm in pitch) formed on a substrate. This PhC was designed for splitting an incident light into the TM and TE modes at 500nm. Photonic band-gaps were changed by rotating the PhC and the transmittance of the TE mode was changed drastically at 420nm. The PhC was attached on the MEMS device (Eco Scan: Japan Signal) to control its angle of incidence. A resonance frequency of the MEMS structure was 183Hz and that rotation angle reached up to 40 degree. Switching characteristics of our MEMS-TOF were confirmed and its availability was demonstrated.

Original language	English
Title of host publication	19th IEEE International Conference on Micro Electro Mechanical Systems
Pages	858-861
Number of pages	4
Volume	2006
Publication status	Published - 2006 Oct 24
Event	19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey Duration: 2006 Jan 22 → 2006 Jan 26

Other

Other	19th IEEE International Conference on Micro Electro Mechanical Systems
Country/Territory	Turkey
City	Istanbul
Period	06/1/22 → 06/1/26

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering
Control and Systems Engineering

Cite this

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title = "MEMS tunable optical filter using auto-cloned photonic crystal",

abstract = "This paper proposes a novel MEMS tunable optical filter (TOP) using an auto-cloned photonic crystal (PhC). The auto-cloning method has great gains to fabricate multi-dimensional PhCs in productivity, flexibility and robustness. A two-dimensional PhC was fabricated by stacking Mb2O5 and SiO2 layers alternately keeping nano-scale periodic corrugations (190nm in pitch) formed on a substrate. This PhC was designed for splitting an incident light into the TM and TE modes at 500nm. Photonic band-gaps were changed by rotating the PhC and the transmittance of the TE mode was changed drastically at 420nm. The PhC was attached on the MEMS device (Eco Scan: Japan Signal) to control its angle of incidence. A resonance frequency of the MEMS structure was 183Hz and that rotation angle reached up to 40 degree. Switching characteristics of our MEMS-TOF were confirmed and its availability was demonstrated.",

author = "S. Nagasawa and T. Onuki and Y. Ohtera and Hiroki Kuwano",

year = "2006",

month = oct,

day = "24",

language = "English",

isbn = "0780394755",

volume = "2006",

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note = "19th IEEE International Conference on Micro Electro Mechanical Systems ; Conference date: 22-01-2006 Through 26-01-2006",

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T1 - MEMS tunable optical filter using auto-cloned photonic crystal

AU - Nagasawa, S.

AU - Onuki, T.

AU - Ohtera, Y.

AU - Kuwano, Hiroki

PY - 2006/10/24

Y1 - 2006/10/24

N2 - This paper proposes a novel MEMS tunable optical filter (TOP) using an auto-cloned photonic crystal (PhC). The auto-cloning method has great gains to fabricate multi-dimensional PhCs in productivity, flexibility and robustness. A two-dimensional PhC was fabricated by stacking Mb2O5 and SiO2 layers alternately keeping nano-scale periodic corrugations (190nm in pitch) formed on a substrate. This PhC was designed for splitting an incident light into the TM and TE modes at 500nm. Photonic band-gaps were changed by rotating the PhC and the transmittance of the TE mode was changed drastically at 420nm. The PhC was attached on the MEMS device (Eco Scan: Japan Signal) to control its angle of incidence. A resonance frequency of the MEMS structure was 183Hz and that rotation angle reached up to 40 degree. Switching characteristics of our MEMS-TOF were confirmed and its availability was demonstrated.

AB - This paper proposes a novel MEMS tunable optical filter (TOP) using an auto-cloned photonic crystal (PhC). The auto-cloning method has great gains to fabricate multi-dimensional PhCs in productivity, flexibility and robustness. A two-dimensional PhC was fabricated by stacking Mb2O5 and SiO2 layers alternately keeping nano-scale periodic corrugations (190nm in pitch) formed on a substrate. This PhC was designed for splitting an incident light into the TM and TE modes at 500nm. Photonic band-gaps were changed by rotating the PhC and the transmittance of the TE mode was changed drastically at 420nm. The PhC was attached on the MEMS device (Eco Scan: Japan Signal) to control its angle of incidence. A resonance frequency of the MEMS structure was 183Hz and that rotation angle reached up to 40 degree. Switching characteristics of our MEMS-TOF were confirmed and its availability was demonstrated.

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M3 - Conference contribution

AN - SCOPUS:33750109709

SN - 0780394755

SN - 9780780394759

VL - 2006

SP - 858

EP - 861

BT - 19th IEEE International Conference on Micro Electro Mechanical Systems

T2 - 19th IEEE International Conference on Micro Electro Mechanical Systems

Y2 - 22 January 2006 through 26 January 2006

ER -

MEMS tunable optical filter using auto-cloned photonic crystal

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