Mesoscopic roughness characterization of grown surfaces by atomic force microscopy

Tatsuo Yoshinobu; Atsushi Iwamoto; Hiroshi Iwasaki

doi:10.1143/JJAP.33.L67

Mesoscopic roughness characterization of grown surfaces by atomic force microscopy

Tatsuo Yoshinobu, Atsushi Iwamoto, Hiroshi Iwasaki

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

Mesoscopic roughness of material surfaces grown on (or dissolved from) flat substrates is described in terms of its scale dependence. It is demonstrated that three parameters, including the characteristic correlation length and the anisotropy exponent of scaling, in addition to the scale independent rms roughness on long length scales, describe well the scaling behavior of roughness. A procedure to derive these parameters from atomic force microscopy data is also discussed.

Original language	English
Pages (from-to)	L67-L69
Journal	Japanese journal of applied physics
Volume	33
Issue number	1A
DOIs	https://doi.org/10.1143/JJAP.33.L67
Publication status	Published - 1994 Jan
Externally published	Yes

Keywords

AFM
Atomic force microscopy
Dissolution
Fractal
Growth
Metrology
Roughness
Self-affine
Surface

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.33.L67

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abstract = "Mesoscopic roughness of material surfaces grown on (or dissolved from) flat substrates is described in terms of its scale dependence. It is demonstrated that three parameters, including the characteristic correlation length and the anisotropy exponent of scaling, in addition to the scale independent rms roughness on long length scales, describe well the scaling behavior of roughness. A procedure to derive these parameters from atomic force microscopy data is also discussed.",

keywords = "AFM, Atomic force microscopy, Dissolution, Fractal, Growth, Metrology, Roughness, Self-affine, Surface",

author = "Tatsuo Yoshinobu and Atsushi Iwamoto and Hiroshi Iwasaki",

year = "1994",

month = jan,

doi = "10.1143/JJAP.33.L67",

language = "English",

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journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

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T1 - Mesoscopic roughness characterization of grown surfaces by atomic force microscopy

AU - Yoshinobu, Tatsuo

AU - Iwamoto, Atsushi

AU - Iwasaki, Hiroshi

PY - 1994/1

Y1 - 1994/1

N2 - Mesoscopic roughness of material surfaces grown on (or dissolved from) flat substrates is described in terms of its scale dependence. It is demonstrated that three parameters, including the characteristic correlation length and the anisotropy exponent of scaling, in addition to the scale independent rms roughness on long length scales, describe well the scaling behavior of roughness. A procedure to derive these parameters from atomic force microscopy data is also discussed.

AB - Mesoscopic roughness of material surfaces grown on (or dissolved from) flat substrates is described in terms of its scale dependence. It is demonstrated that three parameters, including the characteristic correlation length and the anisotropy exponent of scaling, in addition to the scale independent rms roughness on long length scales, describe well the scaling behavior of roughness. A procedure to derive these parameters from atomic force microscopy data is also discussed.

KW - AFM

KW - Atomic force microscopy

KW - Dissolution

KW - Fractal

KW - Growth

KW - Metrology

KW - Roughness

KW - Self-affine

KW - Surface

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 1A

ER -

Mesoscopic roughness characterization of grown surfaces by atomic force microscopy

Abstract

Keywords

ASJC Scopus subject areas

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