Metal-containing diamond-like carbon coating as a smart sensor

Toshiyuki Takagi, Takanori Takeno, Hiroyuki Miki

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Citations (Scopus)

Abstract

A new type of smart sensor based on metal-containing diamond-like carbon (DLC) coatings is presented. DLC coatings are widely used as protective coatings to improve the surface properties of objective materials; for example, to increase hardness and chemical stability. With the addition of metal clusters into DLC coatings, electrical conduction appears to depend on the microstructure. Such coatings can be used in fabricating resistive sensors. In this paper, we present tungsten-containing DLC (W-DLC) as a possible strain sensor. The strain sensitivity is greatly affected by the deposition condition. We also fabricate a double-layered DLC/W-DLC coating. The double-layered structure is expected to be used as a smart coating having functionality as a sensor with a protective DLC overcoat.

Original languageEnglish
Title of host publicationTHERMEC 2009
EditorsTara Chandra, Tara Chandra, Tara Chandra, N. Wanderka, N. Wanderka, N. Wanderka, Walter Reimers, Walter Reimers, Walter Reimers, M. Ionescu, M. Ionescu, M. Ionescu
PublisherTrans Tech Publications Ltd
Pages2103-2108
Number of pages6
ISBN (Print)0878492941, 9780878492947
DOIs
Publication statusPublished - 2010
Event6th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2009 - Berlin, Germany
Duration: 2009 Aug 252009 Aug 29

Publication series

NameMaterials Science Forum
Volume638-642
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

Conference6th International Conference on Processing and Manufacturing of Advanced Materials - THERMEC'2009
Country/TerritoryGermany
CityBerlin
Period09/8/2509/8/29

Keywords

  • Composite
  • Diamond-like carbon
  • Double-layered structure
  • Metal-containing diamond-like carbon
  • Smart sensor

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