Metal-containing diamond-like carbon-silicon nanocomposite films as temperature sensors

T. Takeno, T. Takagi, A. Bozhko, M. Shupegin, T. Sato

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


Metal-carbon nanocomposites are characterized by a number of unique properties, perspective for the various-type applications. The presented experimental data on the conductivity of amorphous tungsten- and niobium-containing carbon-silicon nanocomposite films show the possibility of the design of advanced wide-range temperature sensors, which are expected to possess the chemical stability, biocompatibility, mechanical, and other properties typical for this class of materials. The films were deposited onto polycrystalline substrates using combination of PECVD(Plasma Enhanced Chemical Vapor Deposition) of siloxane vapors and magnetron co-sputtering of metal target. The conductivity σ of the films, measured using standard 4-probe technique in the temperature range 80-400K, is characterized by the gradual decrease with temperature. The experimental σ(T) dependences are well fitted by the universal power expression, σ(T)= σ0+aTn, where σ0, a, and n are the fitting parameters dependent on the value of metal concentration. The conductivity mechanisms in the investigated amorphous metalcontaining carbon-silicon nanocomposite films are discussed in the framework of the model of inelastic tunneling in amorphous insulators in the presence of the structural transformation in carbon-silicon matrix.

Original languageEnglish
Pages (from-to)513-518
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Publication statusPublished - 2003
EventMaterials and Devices for Smart Systems - Boston, MA, United States
Duration: 2003 Dec 12003 Dec 5

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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