Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy

Hiroyuki Odagawa; Koshiro Terada; Hiroaki Nishikawa; Takahiko Yanagitani; Yasuo Cho

doi:10.1080/00150193.2016.1169493

Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy

Hiroyuki Odagawa, Koshiro Terada, Hiroaki Nishikawa, Takahiko Yanagitani, Yasuo Cho

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

A method for obtaining a depth profile of polarity inverted structure in a layered ferroelectric and/or piezoelectric thin film is proposed. It is performed by surface measurement non-destructively using scanning nonlinear dielectric microscopy. We describe estimation principle for the depth profile with some calculation results of measurement signal, which is related to tip radius of the measurement probe and depth of the inverted layer. Also, experimental results in zinc oxide films which have layered polarity-inverted structure fabricated by radio frequency magnetron sputtering and the estimation of the polarity state on the films are shown.

Original language	English
Pages (from-to)	47-51
Number of pages	5
Journal	Ferroelectrics
Volume	498
Issue number	1
DOIs	https://doi.org/10.1080/00150193.2016.1169493
Publication status	Published - 2016 Aug 31

Keywords

non-destructive measurement
polarity inverted structure
polarity measurement
Scanning nonlinear dielectric microscopy

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title = "Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy",

abstract = "A method for obtaining a depth profile of polarity inverted structure in a layered ferroelectric and/or piezoelectric thin film is proposed. It is performed by surface measurement non-destructively using scanning nonlinear dielectric microscopy. We describe estimation principle for the depth profile with some calculation results of measurement signal, which is related to tip radius of the measurement probe and depth of the inverted layer. Also, experimental results in zinc oxide films which have layered polarity-inverted structure fabricated by radio frequency magnetron sputtering and the estimation of the polarity state on the films are shown.",

keywords = "non-destructive measurement, polarity inverted structure, polarity measurement, Scanning nonlinear dielectric microscopy",

author = "Hiroyuki Odagawa and Koshiro Terada and Hiroaki Nishikawa and Takahiko Yanagitani and Yasuo Cho",

note = "Publisher Copyright: {\textcopyright} 2016, {\textcopyright} Taylor & Francis Group, LLC.",

year = "2016",

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T1 - Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy

AU - Odagawa, Hiroyuki

AU - Terada, Koshiro

AU - Nishikawa, Hiroaki

AU - Yanagitani, Takahiko

AU - Cho, Yasuo

PY - 2016/8/31

Y1 - 2016/8/31

N2 - A method for obtaining a depth profile of polarity inverted structure in a layered ferroelectric and/or piezoelectric thin film is proposed. It is performed by surface measurement non-destructively using scanning nonlinear dielectric microscopy. We describe estimation principle for the depth profile with some calculation results of measurement signal, which is related to tip radius of the measurement probe and depth of the inverted layer. Also, experimental results in zinc oxide films which have layered polarity-inverted structure fabricated by radio frequency magnetron sputtering and the estimation of the polarity state on the films are shown.

AB - A method for obtaining a depth profile of polarity inverted structure in a layered ferroelectric and/or piezoelectric thin film is proposed. It is performed by surface measurement non-destructively using scanning nonlinear dielectric microscopy. We describe estimation principle for the depth profile with some calculation results of measurement signal, which is related to tip radius of the measurement probe and depth of the inverted layer. Also, experimental results in zinc oxide films which have layered polarity-inverted structure fabricated by radio frequency magnetron sputtering and the estimation of the polarity state on the films are shown.

KW - non-destructive measurement

KW - polarity inverted structure

KW - polarity measurement

KW - Scanning nonlinear dielectric microscopy

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Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy

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Keywords

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