TY - JOUR
T1 - MgO microparticle deposition by radio frequency impulse discharge in a small-diameter tube
AU - Muraoka, Takumasa
AU - Iizuka, Satoru
PY - 2009/2/1
Y1 - 2009/2/1
N2 - Inner wall surface coating has been performed in Ar/O2 microplasma produced by radio frequency (RF) impulse discharge using a Mg rod electrode in a narrow glass tube. We found formation of MgO microparticles, together with a relatively flat film consisting of MgO between these microparticles. The MgO film containing MgO microparticles was regarded as an efficient secondary electron emission surface for a low-voltage discharge. Effects of oxygen on the formation of MgO microparticles were investigated under different conditions of Ar/O2 mixing ratio. It was found that the MgO microparticles were produced even in the case of a low oxygen mixing ratio.
AB - Inner wall surface coating has been performed in Ar/O2 microplasma produced by radio frequency (RF) impulse discharge using a Mg rod electrode in a narrow glass tube. We found formation of MgO microparticles, together with a relatively flat film consisting of MgO between these microparticles. The MgO film containing MgO microparticles was regarded as an efficient secondary electron emission surface for a low-voltage discharge. Effects of oxygen on the formation of MgO microparticles were investigated under different conditions of Ar/O2 mixing ratio. It was found that the MgO microparticles were produced even in the case of a low oxygen mixing ratio.
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U2 - 10.1143/JJAP.48.025501
DO - 10.1143/JJAP.48.025501
M3 - Article
AN - SCOPUS:60849084136
SN - 0021-4922
VL - 48
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 2
M1 - 025501
ER -