TY - GEN
T1 - Micro and nano measurement instruments
AU - Gao, W.
PY - 2010/1/1
Y1 - 2010/1/1
N2 - This paper presents micro and nano measurement instruments for ultra-precision machining. Optical sensors for measurement of angle and displacement are first described. Technologies for improvement of the sensor sensitivity and bandwidth, reduction of the sensor size as well as development of new multi-axis sensing methods are presented. The second half of the paper presents a number of scanningtype instruments for surface profile measurement. Technologies for reduction of scanning errors, automatic alignment of measuring positions, fast scanning mechanisms are addressed.
AB - This paper presents micro and nano measurement instruments for ultra-precision machining. Optical sensors for measurement of angle and displacement are first described. Technologies for improvement of the sensor sensitivity and bandwidth, reduction of the sensor size as well as development of new multi-axis sensing methods are presented. The second half of the paper presents a number of scanningtype instruments for surface profile measurement. Technologies for reduction of scanning errors, automatic alignment of measuring positions, fast scanning mechanisms are addressed.
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M3 - Conference contribution
AN - SCOPUS:84911459508
T3 - Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
SP - 235
EP - 238
BT - Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
A2 - Shore, P.
A2 - Burke, Theresa
A2 - Spaan, Henny
A2 - Van Brussel, H.
PB - euspen
T2 - 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
Y2 - 31 May 2010 through 4 June 2010
ER -