Micro fluidic chamber with thin Si windows for observation of biological samples in vacuum

Hideki Hayashi; Masaya Toda; Takahito Ono

doi:10.1109/MEMSYS.2015.7050959

Micro fluidic chamber with thin Si windows for observation of biological samples in vacuum

Hideki Hayashi, Masaya Toda, Takahito Ono

ENG - Mechanical Systems Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

A micro fluidic chamber with 178 nm-thick single crystal Si windows on a micro channel has been developed. Because of these thin windows, the aquatic sample inside of the channel can be observed by scanning electron microscopy. Secondary electrons from a sample in the channel are able to be detected in vacuum with an acceleration voltage of 15 kV, where the emission current is 75 μA. The micro fluidic chamber is possibly applied to cell imaging via the Si thin window in vacuum using magnetic resonance force microscopy.

Original language	English
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	344-347
Number of pages	4
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7050959
Publication status	Published - 2015 Feb 26
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Other

Other	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	15/1/18 → 15/1/22

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2015.7050959

Cite this

Hayashi, H., Toda, M., & Ono, T. (2015). Micro fluidic chamber with thin Si windows for observation of biological samples in vacuum. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 344-347). [7050959] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7050959

Micro fluidic chamber with thin Si windows for observation of biological samples in vacuum. / Hayashi, Hideki; Toda, Masaya ; Ono, Takahito.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 344-347 7050959 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hayashi, H, Toda, M & Ono, T 2015, Micro fluidic chamber with thin Si windows for observation of biological samples in vacuum. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7050959, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 344-347, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 15/1/18. https://doi.org/10.1109/MEMSYS.2015.7050959

Hayashi H, Toda M , Ono T. Micro fluidic chamber with thin Si windows for observation of biological samples in vacuum. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 344-347. 7050959. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7050959

Hayashi, Hideki ; Toda, Masaya ; Ono, Takahito. / Micro fluidic chamber with thin Si windows for observation of biological samples in vacuum. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 344-347 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

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Micro fluidic chamber with thin Si windows for observation of biological samples in vacuum

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