Micro industry equipments

Masayoshi Esashi, Takahito Ono, Shuji Tanaka

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


Advanced states of art of MEMS (Micro Electro Mechanical Systems) technology have been applied to micro industry equipments. These are electrostatically levitated ring rotor gyroscope and micro energy source for self moving machines like robots, maintenance systems used in narrow spaces, components for multi-column electron beam lithography and multi-probe data storage, micro gas control systems, micro/nano mold, micro contactor and thermal RF relay for LSI testing and nano-instruments which performs high sensitivity and spatial resolution.

Original languageEnglish
Pages (from-to)429-438
Number of pages10
JournalJSME International Journal, Series B: Fluids and Thermal Engineering
Issue number3
Publication statusPublished - 2004 Aug


  • Energy conversion
  • Flow control
  • Valve


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