@article{38c163fe6df9400ab86a47966deec31d,
title = "Micro Machining and Nano Probe",
keywords = "carbon nanotubes, micro-electro-mechanical system (MEMS), micro-heater, microactuator, near-field scanning optical microscopy (NSOM), scanning probe microscopy (SPM)",
author = "Takahito Ono and Masayoshi Esashi",
year = "2003",
doi = "10.2493/jjspe.69.166",
language = "English",
volume = "69",
pages = "166--169",
journal = "Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "2",
}