This paper describes the charging method of a micro-patterned electret for a high power electrostaic motor. By applying contact electrification using mercury to electret charging, charging to 5 μm-wide micro-patterned electret was achieved. But, 0.9 μm-wide edges of the electret is not charged due to discharge at the edges. Using this method, a silicon-dioxide electret with 0.5 μm thickness was charged up to a charge density of about -100 V/μmSiO 2 with fair repeatability.
|Number of pages||4|
|Journal||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)|
|Publication status||Published - 2004|
|Event||17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands|
Duration: 2004 Jan 25 → 2004 Jan 29