Abstract
This paper describes the charging method of a micro-patterned electret for a high power electrostaic motor. By applying contact electrification using mercury to electret charging, charging to 5 μm-wide micro-patterned electret was achieved. But, 0.9 μm-wide edges of the electret is not charged due to discharge at the edges. Using this method, a silicon-dioxide electret with 0.5 μm thickness was charged up to a charge density of about -100 V/μmSiO 2 with fair repeatability.
| Original language | English |
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| Pages (from-to) | 470-473 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Publication status | Published - 2004 |
| Event | 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands Duration: 2004 Jan 25 → 2004 Jan 29 |