Micro-probing system for slit width measurement by using a shear-force detection

So Ito; Kikuchi Hirotaka; Yuan Liu Chen; Yuki Shimizu; Wei Gao

Micro-probing system for slit width measurement by using a shear-force detection

So Ito, Kikuchi Hirotaka, Yuan Liu Chen, Yuki Shimizu, Wei Gao

ENG - Finemechanics

Research output: Contribution to conference › Paper › peer-review

Abstract

A prototype measurement system by using a micro-probe is introduced for the precision measurement of the slit width. The stylus of the micro-probe is consisted of the thermally-pulled capillary glass tube and precision glass ball with 50 μm in diameter, so that the probe tip can be inserted into the inside of the micro-gap. A shear-force detection micro-probing is employed for the precision measurement of the slit width of the slot die coater. The measurement accuracy of the slit width measurement is investigated.

Original language	English
Publication status	Published - 2015 Oct 18
Event	8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan Duration: 2015 Oct 18 → 2015 Oct 22

Other

Other	8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
Country/Territory	Japan
City	Kyoto
Period	15/10/18 → 15/10/22

Keywords

Gap measurement
Micro-probing
Shear-force detection
Slot die coater

ASJC Scopus subject areas

Industrial and Manufacturing Engineering

Cite this

@conference{7ad67a01201248e0ba7bc6e298a7966e,

title = "Micro-probing system for slit width measurement by using a shear-force detection",

abstract = "A prototype measurement system by using a micro-probe is introduced for the precision measurement of the slit width. The stylus of the micro-probe is consisted of the thermally-pulled capillary glass tube and precision glass ball with 50 μm in diameter, so that the probe tip can be inserted into the inside of the micro-gap. A shear-force detection micro-probing is employed for the precision measurement of the slit width of the slot die coater. The measurement accuracy of the slit width measurement is investigated.",

keywords = "Gap measurement, Micro-probing, Shear-force detection, Slot die coater",

author = "So Ito and Kikuchi Hirotaka and Chen, {Yuan Liu} and Yuki Shimizu and Wei Gao",

note = "Funding Information: This project was supported by Japan Society for the Promotion of Science (JSPS).; 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 ; Conference date: 18-10-2015 Through 22-10-2015",

year = "2015",

month = oct,

day = "18",

language = "English",

}

TY - CONF

T1 - Micro-probing system for slit width measurement by using a shear-force detection

AU - Ito, So

AU - Hirotaka, Kikuchi

AU - Chen, Yuan Liu

AU - Shimizu, Yuki

AU - Gao, Wei

N1 - Funding Information: This project was supported by Japan Society for the Promotion of Science (JSPS).

PY - 2015/10/18

Y1 - 2015/10/18

N2 - A prototype measurement system by using a micro-probe is introduced for the precision measurement of the slit width. The stylus of the micro-probe is consisted of the thermally-pulled capillary glass tube and precision glass ball with 50 μm in diameter, so that the probe tip can be inserted into the inside of the micro-gap. A shear-force detection micro-probing is employed for the precision measurement of the slit width of the slot die coater. The measurement accuracy of the slit width measurement is investigated.

AB - A prototype measurement system by using a micro-probe is introduced for the precision measurement of the slit width. The stylus of the micro-probe is consisted of the thermally-pulled capillary glass tube and precision glass ball with 50 μm in diameter, so that the probe tip can be inserted into the inside of the micro-gap. A shear-force detection micro-probing is employed for the precision measurement of the slit width of the slot die coater. The measurement accuracy of the slit width measurement is investigated.

KW - Gap measurement

KW - Micro-probing

KW - Shear-force detection

KW - Slot die coater

UR - http://www.scopus.com/inward/record.url?scp=84974536567&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84974536567&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:84974536567

T2 - 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015

Y2 - 18 October 2015 through 22 October 2015

ER -

Micro-probing system for slit width measurement by using a shear-force detection

Abstract

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Keywords

ASJC Scopus subject areas

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