@inproceedings{26a17ffaf22b4c14a522a01d8518cb35,
title = "Micro-thermoelectric gas sensor with B- and P-doped SiGe thin film deposited by helicon sputtering",
abstract = "Micro-thermoelectric hydrogen sensor working with the combination of the thermoelectric effect of phosphorus-doped SiGe thin film and the Pt-catalyzed exothermic reaction of hydrogen oxidation has been fabricated. Sensitivity of hydrogen gas of the device was improved by doping the SiGe thermoelectric thin film deposited by helicon sputtering. copyright The Electrochemical Society.",
author = "K. Tajima and W. Shin and M. Nishibori and T. Itoh and N. Izu and I. Matsubara",
year = "2006",
doi = "10.1149/1.2218988",
language = "English",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "21",
pages = "23--27",
booktitle = "Sensors, Actuators, and Microsystems",
edition = "21",
note = "Sensors, Actuators, and Microsystems - 208th Electrochemical Society Meeting ; Conference date: 16-10-2005 Through 21-10-2005",
}