Micro Vapor Cells Sealed by Two-Step Bonding for Miniature Atomic Clocks

Hitoshi Nishino; Yasubumi Furuya; Takahito Ono

doi:10.1109/MEMS51670.2022.9699590

Micro Vapor Cells Sealed by Two-Step Bonding for Miniature Atomic Clocks

Hitoshi Nishino, Yasubumi Furuya, Takahito Ono

ENG - Mechanical Systems Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This study introduces a new method to fabricate and evaluation of vapor cells with Rb sealed by anodic bonding at wafer level for miniature atomic clocks. The proposed method achieves miniaturization and long-term frequency stability by the wafer-level process. Rb encapsulation is achieved by two-step bonding. The vapor cells are fabricated to seal with buffer gas to confirm the stability, and the achieved Allan deviation at an averaging time of 3000 s is 1.7 × 10-11. These results show that the proposed method has improved the long-term stability and has achieved miniaturization compared to the vapor cell fabricated by the conventional method, which uses an alkali-atom dispenser.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Publisher	IEEE Computer Society
Pages	983-986
Number of pages	4
ISBN (Electronic)	9781665409117
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699590
Publication status	Published - 2022
Event	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 2022 Jan 9 → 2022 Jan 13

Publication series

Name	IEEE Symposium on Mass Storage Systems and Technologies
Volume	2022-January
ISSN (Print)	2160-1968

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	22/1/9 → 22/1/13

Keywords

Anodic bonding
MEMS
Miniature atomic clocks
Two-step bonding
Vapor cell

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS51670.2022.9699590

Cite this

Nishino, H., Furuya, Y., & Ono, T. (2022). Micro Vapor Cells Sealed by Two-Step Bonding for Miniature Atomic Clocks. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 983-986). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE Computer Society. https://doi.org/10.1109/MEMS51670.2022.9699590

Micro Vapor Cells Sealed by Two-Step Bonding for Miniature Atomic Clocks. / Nishino, Hitoshi; Furuya, Yasubumi; Ono, Takahito.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Computer Society, 2022. p. 983-986 (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nishino, H, Furuya, Y & Ono, T 2022, Micro Vapor Cells Sealed by Two-Step Bonding for Miniature Atomic Clocks. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Symposium on Mass Storage Systems and Technologies, vol. 2022-January, IEEE Computer Society, pp. 983-986, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 22/1/9. https://doi.org/10.1109/MEMS51670.2022.9699590

@inproceedings{e87052d6ccc445c3bf07238f8ef5bc94,

title = "Micro Vapor Cells Sealed by Two-Step Bonding for Miniature Atomic Clocks",

abstract = "This study introduces a new method to fabricate and evaluation of vapor cells with Rb sealed by anodic bonding at wafer level for miniature atomic clocks. The proposed method achieves miniaturization and long-term frequency stability by the wafer-level process. Rb encapsulation is achieved by two-step bonding. The vapor cells are fabricated to seal with buffer gas to confirm the stability, and the achieved Allan deviation at an averaging time of 3000 s is 1.7 × 10-11. These results show that the proposed method has improved the long-term stability and has achieved miniaturization compared to the vapor cell fabricated by the conventional method, which uses an alkali-atom dispenser. ",

keywords = "Anodic bonding, MEMS, Miniature atomic clocks, Two-step bonding, Vapor cell",

author = "Hitoshi Nishino and Yasubumi Furuya and Takahito Ono",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

year = "2022",

doi = "10.1109/MEMS51670.2022.9699590",

language = "English",

series = "IEEE Symposium on Mass Storage Systems and Technologies",

publisher = "IEEE Computer Society",

pages = "983--986",

booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",

}

TY - GEN

T1 - Micro Vapor Cells Sealed by Two-Step Bonding for Miniature Atomic Clocks

AU - Nishino, Hitoshi

AU - Furuya, Yasubumi

AU - Ono, Takahito

PY - 2022

Y1 - 2022

N2 - This study introduces a new method to fabricate and evaluation of vapor cells with Rb sealed by anodic bonding at wafer level for miniature atomic clocks. The proposed method achieves miniaturization and long-term frequency stability by the wafer-level process. Rb encapsulation is achieved by two-step bonding. The vapor cells are fabricated to seal with buffer gas to confirm the stability, and the achieved Allan deviation at an averaging time of 3000 s is 1.7 × 10-11. These results show that the proposed method has improved the long-term stability and has achieved miniaturization compared to the vapor cell fabricated by the conventional method, which uses an alkali-atom dispenser.

AB - This study introduces a new method to fabricate and evaluation of vapor cells with Rb sealed by anodic bonding at wafer level for miniature atomic clocks. The proposed method achieves miniaturization and long-term frequency stability by the wafer-level process. Rb encapsulation is achieved by two-step bonding. The vapor cells are fabricated to seal with buffer gas to confirm the stability, and the achieved Allan deviation at an averaging time of 3000 s is 1.7 × 10-11. These results show that the proposed method has improved the long-term stability and has achieved miniaturization compared to the vapor cell fabricated by the conventional method, which uses an alkali-atom dispenser.

KW - Anodic bonding

KW - MEMS

KW - Miniature atomic clocks

KW - Two-step bonding

KW - Vapor cell

UR - http://www.scopus.com/inward/record.url?scp=85126396006&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85126396006&partnerID=8YFLogxK

U2 - 10.1109/MEMS51670.2022.9699590

DO - 10.1109/MEMS51670.2022.9699590

M3 - Conference contribution

AN - SCOPUS:85126396006

T3 - IEEE Symposium on Mass Storage Systems and Technologies

SP - 983

EP - 986

BT - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

PB - IEEE Computer Society

T2 - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

Y2 - 9 January 2022 through 13 January 2022

ER -

Micro Vapor Cells Sealed by Two-Step Bonding for Miniature Atomic Clocks

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this