Micro Wishbone interferometer for miniature FTIR spectrometer

Young Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


"Wishbone" type of a Si micro interferometer with a size of 7.5 mm × 7.5 mm is designed and fabricated for applications of the Fourier Transform Infrared (FTIR) spectrometer. The structure of the Si interferometer is fabricated by ICP-RIE etching. Si arms with Au-coated corner cube mirrors at the end can be rotated by integrated rotary comb drive actuators using electrostatic force. Rotational motion of ±4° and the maximum optical path difference of 1920 μm are achieved at an applied voltage of 80 V. With this path length, the resolution of the FT spectroscopy is estimated to be ∼5 cm-1.

Original languageEnglish
Pages (from-to)333-334
Number of pages2
JournalIEEJ Transactions on Sensors and Micromachines
Issue number7
Publication statusPublished - 2010


  • FTIR spectrometer
  • MEMS
  • Miniature interferometer
  • Rotary comb drive actuator
  • Wishbone interferometer


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