@article{2078417c8f584a6797c86b73f794f756,
title = "Microchannels: High-Aspect-Ratio Parallel-Plate Microchannels Applicable to Kinetic Analysis of Chemical Vapor Deposition (Adv. Mater. Interfaces 16/2016)",
keywords = "chemical vapor deposition, high-aspect-ratio feature, silicon carbides, sticking probability, test structures",
author = "Kohei Shima and Yuichi Funato and Hidetoshi Sugiura and Noboru Sato and Yasuyuki Fukushima and Takeshi Momose and Yukihiro Shimogaki",
year = "2016",
month = aug,
day = "19",
doi = "10.1002/admi.201670080",
language = "English",
volume = "3",
journal = "Advanced Materials Interfaces",
issn = "2196-7350",
publisher = "John Wiley and Sons Ltd",
number = "16",
}