Microcrystalline Si1-x Gex, deposited by magnetron sputtering

A. Hiroe, T. Goto, A. Teramoto, T. Ohmi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Microcrystalline Si1-x Gex, deposited by magnetron sputtering'. Together they form a unique fingerprint.

Engineering

Physics

Material Science