Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region

M. Yamaguchi; K. Suezawa; K. I. Arai; Y. Takahashi; S. Kikuchi; Y. Shimada; W. D. Li; S. Tanabe; K. Ito

doi:10.1063/1.370608

Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region

M. Yamaguchi, K. Suezawa, K. I. Arai, Y. Takahashi, S. Kikuchi, Y. Shimada, W. D. Li, S. Tanabe, K. Ito

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

145 Citations (Scopus)

Abstract

Magnetic thin film inductors were developed for mobile communication handsets application. A magnetic thin film-covered spiral coil was microfabricated on high resistivity silicon wafer substrate. Large spacing between the spiral coil and silicon wafer was obtained to reduce eddy current losses in the substrate. The material development, complete microfabrication and finite element simulation of the inductors are further explored.

Original language	English
Pages (from-to)	7919-7922
Number of pages	4
Journal	Journal of Applied Physics
Volume	85
Issue number	11
DOIs	https://doi.org/10.1063/1.370608
Publication status	Published - 1999 Jun

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abstract = "Magnetic thin film inductors were developed for mobile communication handsets application. A magnetic thin film-covered spiral coil was microfabricated on high resistivity silicon wafer substrate. Large spacing between the spiral coil and silicon wafer was obtained to reduce eddy current losses in the substrate. The material development, complete microfabrication and finite element simulation of the inductors are further explored.",

author = "M. Yamaguchi and K. Suezawa and Arai, {K. I.} and Y. Takahashi and S. Kikuchi and Y. Shimada and Li, {W. D.} and S. Tanabe and K. Ito",

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AU - Yamaguchi, M.

AU - Suezawa, K.

AU - Arai, K. I.

AU - Takahashi, Y.

AU - Kikuchi, S.

AU - Shimada, Y.

AU - Li, W. D.

AU - Tanabe, S.

AU - Ito, K.

PY - 1999/6

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N2 - Magnetic thin film inductors were developed for mobile communication handsets application. A magnetic thin film-covered spiral coil was microfabricated on high resistivity silicon wafer substrate. Large spacing between the spiral coil and silicon wafer was obtained to reduce eddy current losses in the substrate. The material development, complete microfabrication and finite element simulation of the inductors are further explored.

AB - Magnetic thin film inductors were developed for mobile communication handsets application. A magnetic thin film-covered spiral coil was microfabricated on high resistivity silicon wafer substrate. Large spacing between the spiral coil and silicon wafer was obtained to reduce eddy current losses in the substrate. The material development, complete microfabrication and finite element simulation of the inductors are further explored.

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Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region

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