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Microfabrication and microsensors
Shuichi Shoji, Masayoshi Esashi
Micro System Integration Center (μSIC)
Research output
:
Contribution to journal
›
Article
›
peer-review
10
Citations (Scopus)
Overview
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Engineering
Microsensor
100%
Micro Machining
66%
Pressure Probe
33%
System Analysis
33%
Microfabrication
33%
Microfabrication Technique
33%
Micropump
33%
Readout Circuit
33%
Microflows
33%