@inproceedings{01ac69731b4048049a88dfb886a6c327,
title = "Micromachined optical components integrated with photodiode",
abstract = "We have fabricated Si optical component integrated with the photodiode. The combined device offers new application. The transparent position sensor enables the alignment monitor at many points of the large syst,em and the pinhole realizes the automatic alignment.",
author = "M. Sasaki and Y. Arai and H. Takebe and K. Hane",
note = "Publisher Copyright: Copyright {\textcopyright} 2018 IEEE - All rights reserved.; 1998 International Microprocesses and Nanotechnology Conference, MNC 1998 ; Conference date: 13-07-1998 Through 16-07-1998",
year = "1998",
doi = "10.1109/IMNC.1998.730039",
language = "English",
series = "Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "192--193",
editor = "Yoo, {Hyung Joon} and Shinji Okazaki and Jinho Ahn and Ohyun Kim and Masanori Komuro",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 1998",
address = "United States",
}