TY - JOUR
T1 - Micromachined optical near-field bow-tie antenna probe with integrated electrostatic actuator
AU - Ono, Takahito
AU - Iwami, Kentaro
AU - Esashi, Masayoshi
PY - 2005
Y1 - 2005
N2 - A bow-tie antenna structure consisting of two opposing metal electrodes separated by a narrow gap is fabricated with an integrated electrostatic actuator to allow the gap to be narrowed further. This configuration allows the near-field localization and conversion efficiency to be optimized beyond that achievable by direct fabrication. The structure is expected to represent an excellent near-field source for high-resolution imaging with high optical transmittance. Electrostatic actuation is demonstrated in both contact- and noncontact-mode operations, and near-field imaging is successfully performed using the device in the illumination mode.
AB - A bow-tie antenna structure consisting of two opposing metal electrodes separated by a narrow gap is fabricated with an integrated electrostatic actuator to allow the gap to be narrowed further. This configuration allows the near-field localization and conversion efficiency to be optimized beyond that achievable by direct fabrication. The structure is expected to represent an excellent near-field source for high-resolution imaging with high optical transmittance. Electrostatic actuation is demonstrated in both contact- and noncontact-mode operations, and near-field imaging is successfully performed using the device in the illumination mode.
KW - Bow-tie antenna
KW - Electrostatic actuator
KW - Micro-electro- mechanical systems
KW - Scanning near-field optical microscopy
KW - Surface plasmon
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U2 - 10.1143/JJAP.44.L445
DO - 10.1143/JJAP.44.L445
M3 - Article
AN - SCOPUS:20444508027
SN - 0021-4922
VL - 44
SP - L445-L448
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 12-15
ER -