Micromachined optical near-field bow-tie antenna probe with integrated electrostatic actuator

Takahito Ono, Kentaro Iwami, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


A bow-tie antenna structure consisting of two opposing metal electrodes separated by a narrow gap is fabricated with an integrated electrostatic actuator to allow the gap to be narrowed further. This configuration allows the near-field localization and conversion efficiency to be optimized beyond that achievable by direct fabrication. The structure is expected to represent an excellent near-field source for high-resolution imaging with high optical transmittance. Electrostatic actuation is demonstrated in both contact- and noncontact-mode operations, and near-field imaging is successfully performed using the device in the illumination mode.

Original languageEnglish
Pages (from-to)L445-L448
JournalJapanese Journal of Applied Physics
Issue number12-15
Publication statusPublished - 2005


  • Bow-tie antenna
  • Electrostatic actuator
  • Micro-electro- mechanical systems
  • Scanning near-field optical microscopy
  • Surface plasmon


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