Micromachined probe for high density data storage

Takahito Ono; Phan Ngoc Minh; Dong Weon Lee; Masayoshi Esashi

Micromachined probe for high density data storage

Takahito Ono, Phan Ngoc Minh, Dong Weon Lee, Masayoshi Esashi

ENG - Mechanical Systems Engineering

Tohoku University

Research output: Contribution to conference › Paper › peer-review

Abstract

Near-field microprobes with high optical transmittance for optical recording and multi-probes with a metal wire as a heater for thermal recording were fabricated by silicon micromachining. Pyramidal etch pits were defined on Si(100) wafer by oxidation, lithography, SiO₂ patterning and Si etching with tetramethyl ammonium hydroxide (TMAH). The aperture showed a high optical transmittance due to a large opening angle in the SiO₂ tip. Micro-thermal probe array based on atomic force microscopy (AFM) were fabricated and evaluated. The total recording speed for the device was found to be 300 Mbits/sec.

Original language	English
Pages	II542-II543
Publication status	Published - 2001
Event	4th Pacific Rim Conference on Lasers and Electro-Optics - Chiba, Japan Duration: 2001 Jul 15 → 2001 Jul 19

Conference

Conference	4th Pacific Rim Conference on Lasers and Electro-Optics
Country/Territory	Japan
City	Chiba
Period	01/7/15 → 01/7/19

Cite this

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title = "Micromachined probe for high density data storage",

abstract = "Near-field microprobes with high optical transmittance for optical recording and multi-probes with a metal wire as a heater for thermal recording were fabricated by silicon micromachining. Pyramidal etch pits were defined on Si(100) wafer by oxidation, lithography, SiO2 patterning and Si etching with tetramethyl ammonium hydroxide (TMAH). The aperture showed a high optical transmittance due to a large opening angle in the SiO2 tip. Micro-thermal probe array based on atomic force microscopy (AFM) were fabricated and evaluated. The total recording speed for the device was found to be 300 Mbits/sec.",

author = "Takahito Ono and Minh, {Phan Ngoc} and Lee, {Dong Weon} and Masayoshi Esashi",

year = "2001",

language = "English",

pages = "II542--II543",

note = "4th Pacific Rim Conference on Lasers and Electro-Optics ; Conference date: 15-07-2001 Through 19-07-2001",

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TY - CONF

T1 - Micromachined probe for high density data storage

AU - Ono, Takahito

AU - Minh, Phan Ngoc

AU - Lee, Dong Weon

AU - Esashi, Masayoshi

PY - 2001

Y1 - 2001

N2 - Near-field microprobes with high optical transmittance for optical recording and multi-probes with a metal wire as a heater for thermal recording were fabricated by silicon micromachining. Pyramidal etch pits were defined on Si(100) wafer by oxidation, lithography, SiO2 patterning and Si etching with tetramethyl ammonium hydroxide (TMAH). The aperture showed a high optical transmittance due to a large opening angle in the SiO2 tip. Micro-thermal probe array based on atomic force microscopy (AFM) were fabricated and evaluated. The total recording speed for the device was found to be 300 Mbits/sec.

AB - Near-field microprobes with high optical transmittance for optical recording and multi-probes with a metal wire as a heater for thermal recording were fabricated by silicon micromachining. Pyramidal etch pits were defined on Si(100) wafer by oxidation, lithography, SiO2 patterning and Si etching with tetramethyl ammonium hydroxide (TMAH). The aperture showed a high optical transmittance due to a large opening angle in the SiO2 tip. Micro-thermal probe array based on atomic force microscopy (AFM) were fabricated and evaluated. The total recording speed for the device was found to be 300 Mbits/sec.

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UR - http://www.scopus.com/inward/citedby.url?scp=0035681743&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0035681743

SP - II542-II543

T2 - 4th Pacific Rim Conference on Lasers and Electro-Optics

Y2 - 15 July 2001 through 19 July 2001

ER -

Micromachined probe for high density data storage

Abstract

Conference

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