Micromachined probe for high density data storage

Takahito Ono, Phan Ngoc Minh, Dong Weon Lee, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review


Near-field microprobes with high optical transmittance for optical recording and multi-probes with a metal wire as a heater for thermal recording were fabricated by silicon micromachining. Pyramidal etch pits were defined on Si(100) wafer by oxidation, lithography, SiO2 patterning and Si etching with tetramethyl ammonium hydroxide (TMAH). The aperture showed a high optical transmittance due to a large opening angle in the SiO2 tip. Micro-thermal probe array based on atomic force microscopy (AFM) were fabricated and evaluated. The total recording speed for the device was found to be 300 Mbits/sec.

Original languageEnglish
Publication statusPublished - 2001
Event4th Pacific Rim Conference on Lasers and Electro-Optics - Chiba, Japan
Duration: 2001 Jul 152001 Jul 19


Conference4th Pacific Rim Conference on Lasers and Electro-Optics


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