Micromachine/MEMS

Masayoshi Esashi

doi:10.2493/jjspe.75.78

Micromachine/MEMS

Masayoshi Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Original language	English
Pages (from-to)	78-79
Number of pages	2
Journal	Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume	75
Issue number	1
DOIs	https://doi.org/10.2493/jjspe.75.78
Publication status	Published - 2009 Jan

ASJC Scopus subject areas

Mechanical Engineering

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10.2493/jjspe.75.78

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title = "Micromachine/MEMS",

author = "Masayoshi Esashi",

year = "2009",

month = jan,

doi = "10.2493/jjspe.75.78",

language = "English",

volume = "75",

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issn = "0912-0289",

publisher = "Japan Society for Precision Engineering",

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Micromachine/MEMS

ASJC Scopus subject areas

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