Micromachining: Present and future

Masayoshi Esashi

doi:10.2493/jjspe.62.52

Micromachining: Present and future

Masayoshi Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	52-58
Number of pages	7
Journal	Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume	62
Issue number	1
DOIs	https://doi.org/10.2493/jjspe.62.52
Publication status	Published - 1996

Keywords

Laser process
Microactuator
Micromachine
Micromachining
Microsystem
Photolithography
Reactive ion etching
Sensor

ASJC Scopus subject areas

Mechanical Engineering

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10.2493/jjspe.62.52

Cite this

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title = "Micromachining: Present and future",

keywords = "Laser process, Microactuator, Micromachine, Micromachining, Microsystem, Photolithography, Reactive ion etching, Sensor",

author = "Masayoshi Esashi",

year = "1996",

doi = "10.2493/jjspe.62.52",

language = "English",

volume = "62",

pages = "52--58",

journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",

issn = "0912-0289",

publisher = "Japan Society for Precision Engineering",

number = "1",

}

TY - JOUR

T1 - Micromachining

T2 - Present and future

AU - Esashi, Masayoshi

PY - 1996

Y1 - 1996

KW - Laser process

KW - Microactuator

KW - Micromachine

KW - Micromachining

KW - Microsystem

KW - Photolithography

KW - Reactive ion etching

KW - Sensor

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U2 - 10.2493/jjspe.62.52

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M3 - Article

AN - SCOPUS:5844279510

SN - 0912-0289

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JO - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

JF - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

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Micromachining: Present and future

Keywords

ASJC Scopus subject areas

Access to Document

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