@inproceedings{e055d8c19f4d490fa3279d8b04a47c7e,
title = "Micromirror integrated with piezoresistive rotation angle sensor for measuring small signal",
abstract = "A piezoresistive rotation angle sensor is integrated in a micromirror device. The sensor detects the shear stress inside the torsion bar generated by the mirror rotation. The small sensor signal is successfully measured using the time-modulation method clearing the detailed performance of the sensor. The accuracy of 0.03 degrees is confirmed. The improved device design is illustrated.",
keywords = "Micromirror, Piezoresistive sensor, Rotation angle sensor, Shear gauge, Time-modulation",
author = "Motoki Tabata and Minoru Sasaki and Kazuhiro Hane",
year = "2006",
language = "English",
isbn = "078039562X",
series = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",
pages = "62--63",
booktitle = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",
note = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 ; Conference date: 21-08-2006 Through 24-08-2006",
}