Micromirror with thin film torsion bar and vertical comb using tensile poly-si

Masayuki Fujishima, Minoru Sasaki, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
PublisherIEEE Computer Society
Pages108-109
Number of pages2
ISBN (Print)078039562X, 9780780395626
DOIs
Publication statusPublished - 2006
EventIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
Duration: 2006 Aug 212006 Aug 24

Publication series

NameIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Conference

ConferenceIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Country/TerritoryUnited States
CityBig Sky, MT
Period06/8/2106/8/24

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