Microscopic x-ray photoelectron spectroscopy using a focused soft x-ray beam

Ken Ninomiya, Atsushi Momose

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


An axisymmetric Wolter type mirror is used in a synchrotron radiation beamline to focus 150 eV soft x rays for microscopic x-ray photoelectron spectroscopy (XPS). The focusing characteristics are evaluated for x-ray source sizes of 1 mm, 200 and 120 μ m in diameter. In this evaluation, the Si(2p) photoelectrons from a Si sample are counted while a knife edge is scanned across the focal point of the mirror. The lateral resolution is 2 μm by the 25%-75% criterion, and 4μm by the full width at half-maximum definition in the beam intensity profile. The Wolter type mirror is expected to provide microscopic XPS techniques with micrometer to sub-micrometer resolution.

Original languageEnglish
Pages (from-to)1244-1247
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number3
Publication statusPublished - 1991 May


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