TY - GEN
T1 - Miniature Fourier transform infrared spectrometer for middle infrared wavelength range
AU - Tanahashi, Tatsuyuki
AU - Toda, Masaya
AU - Miyashita, Hidetoshi
AU - Ono, Takahito
PY - 2013
Y1 - 2013
N2 - A miniature Fourier transform infrared spectrometer (FTIR) is designed and fabricated. The spectrometer consists of an electrostatically-driven Si wishbone interferometer (size: 8 × 8 mm2), Si capacitive displacement sensor, light source with an aperture, and detector. Three-dimensional Si micromirror is assembled on the interferometer. The miniature FTIR operates in mid-infrared range, and multi gas detection including CO2 and water has been demonstrated using this miniaturized FTIR.
AB - A miniature Fourier transform infrared spectrometer (FTIR) is designed and fabricated. The spectrometer consists of an electrostatically-driven Si wishbone interferometer (size: 8 × 8 mm2), Si capacitive displacement sensor, light source with an aperture, and detector. Three-dimensional Si micromirror is assembled on the interferometer. The miniature FTIR operates in mid-infrared range, and multi gas detection including CO2 and water has been demonstrated using this miniaturized FTIR.
KW - micro corner cube mirror
KW - micro-interferometer
KW - Miniature Fourier transform infrared spectrometer
KW - multi gas detection
UR - http://www.scopus.com/inward/record.url?scp=84891694484&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84891694484&partnerID=8YFLogxK
U2 - 10.1109/Transducers.2013.6627316
DO - 10.1109/Transducers.2013.6627316
M3 - Conference contribution
AN - SCOPUS:84891694484
SN - 9781467359818
T3 - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
SP - 2509
EP - 2512
BT - 2013 Transducers and Eurosensors XXVII
T2 - 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Y2 - 16 June 2013 through 20 June 2013
ER -