Miniature interferometer with corner cube mirrors

Young Min Lee; Masaya Toda; Takahito Ono; Masayoshi Esashi

doi:10.1109/ICSENS.2010.5690828

Miniature interferometer with corner cube mirrors

Young Min Lee, Masaya Toda, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

A miniature Wishbone type interferometer for a spectrometer is designed and fabricated, which has electrically actuated rotary comb drives. The three-dimensional corner cube mirror is mounted at the end of Si arms integrated with rotary comb drive actuators. The total size of the interferometer is approximately 8 mm x 8 mm, which is bonded with a glass substrate. The corner cube mirrors with sharp edges are fabricated using indentation technique. The size of the corner cube mirrors is approximately 1 mm x 1 mm x 0.5 mm. The rotation angle of the rotary comb drive was approximately 11 degrees at an applied voltage of 180 V. Hereby, the maximum optical path difference of approximately 2640 μm was achieved, which corresponds to the theoretical resolution of ∼ 4.0 cm^-1 as a spectrometer.

Original language	English
Title of host publication	IEEE Sensors 2010 Conference, SENSORS 2010
Pages	65-70
Number of pages	6
DOIs	https://doi.org/10.1109/ICSENS.2010.5690828
Publication status	Published - 2010
Event	9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States Duration: 2010 Nov 1 → 2010 Nov 4

Publication series

Name	Proceedings of IEEE Sensors

Other

Other	9th IEEE Sensors Conference 2010, SENSORS 2010
Country/Territory	United States
City	Waikoloa, HI
Period	10/11/1 → 10/11/4

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/ICSENS.2010.5690828

Cite this

@inproceedings{34ee729cccd64a9caeb2690f2c953f27,

title = "Miniature interferometer with corner cube mirrors",

abstract = "A miniature Wishbone type interferometer for a spectrometer is designed and fabricated, which has electrically actuated rotary comb drives. The three-dimensional corner cube mirror is mounted at the end of Si arms integrated with rotary comb drive actuators. The total size of the interferometer is approximately 8 mm x 8 mm, which is bonded with a glass substrate. The corner cube mirrors with sharp edges are fabricated using indentation technique. The size of the corner cube mirrors is approximately 1 mm x 1 mm x 0.5 mm. The rotation angle of the rotary comb drive was approximately 11 degrees at an applied voltage of 180 V. Hereby, the maximum optical path difference of approximately 2640 μm was achieved, which corresponds to the theoretical resolution of ∼ 4.0 cm-1 as a spectrometer.",

author = "Lee, {Young Min} and Masaya Toda and Takahito Ono and Masayoshi Esashi",

year = "2010",

doi = "10.1109/ICSENS.2010.5690828",

language = "English",

isbn = "9781424481682",

series = "Proceedings of IEEE Sensors",

pages = "65--70",

booktitle = "IEEE Sensors 2010 Conference, SENSORS 2010",

}

TY - GEN

T1 - Miniature interferometer with corner cube mirrors

AU - Lee, Young Min

AU - Toda, Masaya

AU - Ono, Takahito

AU - Esashi, Masayoshi

PY - 2010

Y1 - 2010

N2 - A miniature Wishbone type interferometer for a spectrometer is designed and fabricated, which has electrically actuated rotary comb drives. The three-dimensional corner cube mirror is mounted at the end of Si arms integrated with rotary comb drive actuators. The total size of the interferometer is approximately 8 mm x 8 mm, which is bonded with a glass substrate. The corner cube mirrors with sharp edges are fabricated using indentation technique. The size of the corner cube mirrors is approximately 1 mm x 1 mm x 0.5 mm. The rotation angle of the rotary comb drive was approximately 11 degrees at an applied voltage of 180 V. Hereby, the maximum optical path difference of approximately 2640 μm was achieved, which corresponds to the theoretical resolution of ∼ 4.0 cm-1 as a spectrometer.

AB - A miniature Wishbone type interferometer for a spectrometer is designed and fabricated, which has electrically actuated rotary comb drives. The three-dimensional corner cube mirror is mounted at the end of Si arms integrated with rotary comb drive actuators. The total size of the interferometer is approximately 8 mm x 8 mm, which is bonded with a glass substrate. The corner cube mirrors with sharp edges are fabricated using indentation technique. The size of the corner cube mirrors is approximately 1 mm x 1 mm x 0.5 mm. The rotation angle of the rotary comb drive was approximately 11 degrees at an applied voltage of 180 V. Hereby, the maximum optical path difference of approximately 2640 μm was achieved, which corresponds to the theoretical resolution of ∼ 4.0 cm-1 as a spectrometer.

UR - http://www.scopus.com/inward/record.url?scp=79951891212&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79951891212&partnerID=8YFLogxK

U2 - 10.1109/ICSENS.2010.5690828

DO - 10.1109/ICSENS.2010.5690828

M3 - Conference contribution

AN - SCOPUS:79951891212

SN - 9781424481682

T3 - Proceedings of IEEE Sensors

SP - 65

EP - 70

BT - IEEE Sensors 2010 Conference, SENSORS 2010

T2 - 9th IEEE Sensors Conference 2010, SENSORS 2010

Y2 - 1 November 2010 through 4 November 2010

ER -

Miniature interferometer with corner cube mirrors

Abstract

Publication series

Other

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this