Miniature interferometer with corner cube mirrors

Young Min Lee, Masaya Toda, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)


A miniature Wishbone type interferometer for a spectrometer is designed and fabricated, which has electrically actuated rotary comb drives. The three-dimensional corner cube mirror is mounted at the end of Si arms integrated with rotary comb drive actuators. The total size of the interferometer is approximately 8 mm x 8 mm, which is bonded with a glass substrate. The corner cube mirrors with sharp edges are fabricated using indentation technique. The size of the corner cube mirrors is approximately 1 mm x 1 mm x 0.5 mm. The rotation angle of the rotary comb drive was approximately 11 degrees at an applied voltage of 180 V. Hereby, the maximum optical path difference of approximately 2640 μm was achieved, which corresponds to the theoretical resolution of ∼ 4.0 cm-1 as a spectrometer.

Original languageEnglish
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Number of pages6
Publication statusPublished - 2010
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: 2010 Nov 12010 Nov 4

Publication series

NameProceedings of IEEE Sensors


Other9th IEEE Sensors Conference 2010, SENSORS 2010
Country/TerritoryUnited States
CityWaikoloa, HI

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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