Miniature surface acoustic wave devices with excellent temperature stability using high density metal electrodes and SiO2 film

Michio Kadota; Takeshi Nakao; Kenji Nishiyama; Shunsuke Kido; Masanori Kato; Ryoichi Omote; Hiroshi Yonekura; Norihiko Takada; Ryoichi Kita; Yasuharu Nakai; Daisuke Yamamoto

doi:10.1109/MWSYM.2008.4632965

Miniature surface acoustic wave devices with excellent temperature stability using high density metal electrodes and SiO² film

Michio Kadota, Takeshi Nakao, Kenji Nishiyama, Shunsuke Kido, Masanori Kato, Ryoichi Omote, Hiroshi Yonekura, Norihiko Takada, Ryoichi Kita, Yasuharu Nakai, Daisuke Yamamoto

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Citations (Scopus)

Abstract

Currently, miniature surface acoustic wave (SAW) devices (filters and duplexers) with a good temperature stability are strongly required. In order to realize its requirement, various SAW substrates combining a high density metal electrode, a SiO₂ film, and LiTaO₃ or LiNbO₃ substrate were researched. Their combinations offer excellent properties such as large electrode reflection coefficient, large mechanical coupling factor, low velocity, and good temperature stability. This paper reviews realization of miniature SAW devices with low insertion loss and good temperature stability, such as SAW duplexers for personal communication service system in the United States (US-PCS) and wide band code division multiple access system (W-CDMA) using thier combinatios.

Original language	English
Title of host publication	2008 IEEE MTT-S International Microwave Symposium Digest, MTT
Pages	847-850
Number of pages	4
DOIs	https://doi.org/10.1109/MWSYM.2008.4632965
Publication status	Published - 2008 Dec 12
Event	2008 IEEE MTT-S International Microwave Symposium Digest, MTT - Atlanta, GA, United States Duration: 2008 Jun 15 → 2008 Jun 20

Publication series

Name	IEEE MTT-S International Microwave Symposium Digest
ISSN (Print)	0149-645X

Other

Other	2008 IEEE MTT-S International Microwave Symposium Digest, MTT
Country/Territory	United States
City	Atlanta, GA
Period	08/6/15 → 08/6/20

ASJC Scopus subject areas

Radiation
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/MWSYM.2008.4632965

Cite this

Kadota, M., Nakao, T., Nishiyama, K., Kido, S., Kato, M., Omote, R., Yonekura, H., Takada, N., Kita, R., Nakai, Y., & Yamamoto, D. (2008). Miniature surface acoustic wave devices with excellent temperature stability using high density metal electrodes and SiO² film. In 2008 IEEE MTT-S International Microwave Symposium Digest, MTT (pp. 847-850). [4632965] (IEEE MTT-S International Microwave Symposium Digest). https://doi.org/10.1109/MWSYM.2008.4632965

Miniature surface acoustic wave devices with excellent temperature stability using high density metal electrodes and SiO² film. / Kadota, Michio; Nakao, Takeshi; Nishiyama, Kenji et al.
2008 IEEE MTT-S International Microwave Symposium Digest, MTT. 2008. p. 847-850 4632965 (IEEE MTT-S International Microwave Symposium Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kadota, M, Nakao, T, Nishiyama, K, Kido, S, Kato, M, Omote, R, Yonekura, H, Takada, N, Kita, R, Nakai, Y & Yamamoto, D 2008, Miniature surface acoustic wave devices with excellent temperature stability using high density metal electrodes and SiO² film. in 2008 IEEE MTT-S International Microwave Symposium Digest, MTT., 4632965, IEEE MTT-S International Microwave Symposium Digest, pp. 847-850, 2008 IEEE MTT-S International Microwave Symposium Digest, MTT, Atlanta, GA, United States, 08/6/15. https://doi.org/10.1109/MWSYM.2008.4632965

Kadota M, Nakao T, Nishiyama K, Kido S, Kato M, Omote R et al. Miniature surface acoustic wave devices with excellent temperature stability using high density metal electrodes and SiO² film. In 2008 IEEE MTT-S International Microwave Symposium Digest, MTT. 2008. p. 847-850. 4632965. (IEEE MTT-S International Microwave Symposium Digest). doi: 10.1109/MWSYM.2008.4632965

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abstract = "Currently, miniature surface acoustic wave (SAW) devices (filters and duplexers) with a good temperature stability are strongly required. In order to realize its requirement, various SAW substrates combining a high density metal electrode, a SiO2 film, and LiTaO3 or LiNbO3 substrate were researched. Their combinations offer excellent properties such as large electrode reflection coefficient, large mechanical coupling factor, low velocity, and good temperature stability. This paper reviews realization of miniature SAW devices with low insertion loss and good temperature stability, such as SAW duplexers for personal communication service system in the United States (US-PCS) and wide band code division multiple access system (W-CDMA) using thier combinatios.",

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AU - Omote, Ryoichi

AU - Yonekura, Hiroshi

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