Miniature wishbone interferometer using rotary comb drive actuator for environment gas monitoring

Young Min Lee; Masaya Toda; Masayoshi Esashi; Takahito Ono

doi:10.1109/MEMSYS.2011.5734525

Miniature wishbone interferometer using rotary comb drive actuator for environment gas monitoring

Young Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

Miniature interferometer with a maximum resolution of approximately 2 cm^-1 which consists of the rotary comb drive actuator, three-dimensional corner cube mirrors, beam splitter and capacitive displacement sensor. The total size of the interferometer is approximately 8 × 8 mm². The displacement of the corner cube mirror has approximately 650 μm when a voltage of 180 V is applied and this displacement observed using capacitive displacement sensor. Hereby, the maximum optical path difference of approximately 2640 μm is achieved. The interferogram of the superluminescent diode light source is successfully detected and its wavenumber of approximately 12000 cm^-1 is indentified.

Original language	English
Title of host publication	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages	716-719
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734525
Publication status	Published - 2011
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 2011 Jan 23 → 2011 Jan 27

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Country/Territory	Mexico
City	Cancun
Period	11/1/23 → 11/1/27

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2011.5734525

Cite this

Lee, Y. M., Toda, M., Esashi, M., & Ono, T. (2011). Miniature wishbone interferometer using rotary comb drive actuator for environment gas monitoring. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 716-719). [5734525] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734525

Miniature wishbone interferometer using rotary comb drive actuator for environment gas monitoring. / Lee, Young Min; Toda, Masaya; Esashi, Masayoshi et al.
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 716-719 5734525 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Lee, YM, Toda, M, Esashi, M & Ono, T 2011, Miniature wishbone interferometer using rotary comb drive actuator for environment gas monitoring. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011., 5734525, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 716-719, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 11/1/23. https://doi.org/10.1109/MEMSYS.2011.5734525

Lee YM, Toda M, Esashi M, Ono T. Miniature wishbone interferometer using rotary comb drive actuator for environment gas monitoring. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 716-719. 5734525. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2011.5734525

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abstract = "Miniature interferometer with a maximum resolution of approximately 2 cm-1 which consists of the rotary comb drive actuator, three-dimensional corner cube mirrors, beam splitter and capacitive displacement sensor. The total size of the interferometer is approximately 8 × 8 mm2. The displacement of the corner cube mirror has approximately 650 μm when a voltage of 180 V is applied and this displacement observed using capacitive displacement sensor. Hereby, the maximum optical path difference of approximately 2640 μm is achieved. The interferogram of the superluminescent diode light source is successfully detected and its wavenumber of approximately 12000 cm-1 is indentified.",

author = "Lee, {Young Min} and Masaya Toda and Masayoshi Esashi and Takahito Ono",

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Miniature wishbone interferometer using rotary comb drive actuator for environment gas monitoring

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