@inproceedings{da480e64aeb74f1ca735154a38ddb844,
title = "Mirror with two parallel rotation axes for external cavity laser",
abstract = "A mirror device for an external cavity diode laser is fabricated. To achieve a wide and continuous tuning range, mechanical linkage of two parallel rotation axes can rotate and translate the mirror, generating a virtual pivot point of the mirror motion. This mirror device is realized using a wafer-folding technique.",
keywords = "Comb drive actuator, Mode hop free, SOI MEMS, Tunable laser",
author = "Masahiro Ishimori and Minoru Sasaki and Kazuhiro Hane",
year = "2005",
doi = "10.1109/OMEMS.2005.1540093",
language = "English",
isbn = "0780392787",
series = "IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications",
pages = "93--94",
booktitle = "IEEE/LEOS Optical MEMS 2005",
note = "IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications ; Conference date: 01-08-2005 Through 04-08-2005",
}