Mode-Matched Multi-Ring Disk Resonator Using (100) Single Crystal Silicon

Shihe Wang, Jianlin Chen, Takashiro Tsukamoto, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Citations (Scopus)

Abstract

This paper reports a novel mode-matched multi-ring disk resonator made on a (100) single crystal silicon. The anisotropy of the stiffness was compensated by the combination of multiple ring structures and elliptic interconnection structures. The stiffness of the interconnection structure could control the modal stiffness of whole structure. By optimizing the structural parameters, two n = 2 wineglass modes could be degenerated. The experimental results using a device fabricated by standard SOI process successfully demonstrated that the resonant frequencies were 43.807 and 43.746 kHz, which means the as-fabricated frequency mismatch was as small as only 0.14%.

Original languageEnglish
Title of host publication35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages786-789
Number of pages4
ISBN (Electronic)9781665409117
DOIs
Publication statusPublished - 2022
Event35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
Duration: 2022 Jan 92022 Jan 13

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2022-January
ISSN (Print)1084-6999

Conference

Conference35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/TerritoryJapan
CityTokyo
Period22/1/922/1/13

Keywords

  • (100) single crystal silicon
  • Mode matching
  • disk resonator
  • multi-ring

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