TY - JOUR
T1 - Modeling and experimental analysis on the nonlinearity of single crystal silicon cantilevered microstructures
AU - Jiang, Yonggang
AU - Esashi, Masayoshi
AU - Ono, Takahito
PY - 2011
Y1 - 2011
N2 - Single crystal silicon microcantilevers with different supporting properties are fabricated for nonlinearity analysis. Using a modeling method, the frequency responses of the microcantilevers are fitted and their nonlinearity parameters are calculated. It is found that the nonlinearity parameter decreases by increasing the length of the cantilever. For the cantilever with same length, narrow cantilevers have smaller nonlinearity parameters. Microcantilevers with a "soft" supporting plate are more susceptible to nonlinear behavior, and the nonlinear parameter increases by increasing the length of the "soft" supporting plate.
AB - Single crystal silicon microcantilevers with different supporting properties are fabricated for nonlinearity analysis. Using a modeling method, the frequency responses of the microcantilevers are fitted and their nonlinearity parameters are calculated. It is found that the nonlinearity parameter decreases by increasing the length of the cantilever. For the cantilever with same length, narrow cantilevers have smaller nonlinearity parameters. Microcantilevers with a "soft" supporting plate are more susceptible to nonlinear behavior, and the nonlinear parameter increases by increasing the length of the "soft" supporting plate.
KW - Microcantilever
KW - Nonlinearity
KW - Softening-spring effect
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U2 - 10.1541/ieejsmas.131.195
DO - 10.1541/ieejsmas.131.195
M3 - Article
AN - SCOPUS:80052472788
SN - 1341-8939
VL - 131
SP - 195
EP - 196
JO - IEEJ Transactions on Sensors and Micromachines
JF - IEEJ Transactions on Sensors and Micromachines
IS - 5
ER -