Moiré signals in reflection

V. T. Chitnis; Y. Uchida; K. Hane; S. Hattori

doi:10.1016/0030-4018(85)90292-5

Moiré signals in reflection

V. T. Chitnis, Y. Uchida, K. Hane, S. Hattori

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

One of the recent applications of the moiré interferometric technique is in mask alignment for lithography. Usually it is necessary to use reflection moiré systems for alignment. We have analysed theoretically and experimentally the behaviour of moiré signals in reflection, as well as in transmission, with the gap as parameter. A periodic variation of the contrast of the moiré signals was observed when the gap was varied within the Fresnel region. The moiré signals were found to be superimposed on a background which varies with the gap. This variation of background was different for reflection and transmission. However, in both cases the alignment signal itself in the alignment method we are proposing, is independent of small variations in the gap between the two gratings.

Original language	English
Pages (from-to)	207-211
Number of pages	5
Journal	Optics Communications
Volume	54
Issue number	4
DOIs	https://doi.org/10.1016/0030-4018(85)90292-5
Publication status	Published - 1985 Jun 15
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Physical and Theoretical Chemistry
Electrical and Electronic Engineering

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10.1016/0030-4018(85)90292-5

Cite this

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title = "Moir{\'e} signals in reflection",

abstract = "One of the recent applications of the moir{\'e} interferometric technique is in mask alignment for lithography. Usually it is necessary to use reflection moir{\'e} systems for alignment. We have analysed theoretically and experimentally the behaviour of moir{\'e} signals in reflection, as well as in transmission, with the gap as parameter. A periodic variation of the contrast of the moir{\'e} signals was observed when the gap was varied within the Fresnel region. The moir{\'e} signals were found to be superimposed on a background which varies with the gap. This variation of background was different for reflection and transmission. However, in both cases the alignment signal itself in the alignment method we are proposing, is independent of small variations in the gap between the two gratings.",

author = "Chitnis, {V. T.} and Y. Uchida and K. Hane and S. Hattori",

note = "Funding Information: One of us (V.T. Chitnis), on leavef rom the National Physical Laboratory, New Delhi, India, gratefully acknowledgesth e financial support from the Ministry of Education of Japan.",

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doi = "10.1016/0030-4018(85)90292-5",

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T1 - Moiré signals in reflection

AU - Chitnis, V. T.

AU - Uchida, Y.

AU - Hane, K.

AU - Hattori, S.

N1 - Funding Information: One of us (V.T. Chitnis), on leavef rom the National Physical Laboratory, New Delhi, India, gratefully acknowledgesth e financial support from the Ministry of Education of Japan.

PY - 1985/6/15

Y1 - 1985/6/15

N2 - One of the recent applications of the moiré interferometric technique is in mask alignment for lithography. Usually it is necessary to use reflection moiré systems for alignment. We have analysed theoretically and experimentally the behaviour of moiré signals in reflection, as well as in transmission, with the gap as parameter. A periodic variation of the contrast of the moiré signals was observed when the gap was varied within the Fresnel region. The moiré signals were found to be superimposed on a background which varies with the gap. This variation of background was different for reflection and transmission. However, in both cases the alignment signal itself in the alignment method we are proposing, is independent of small variations in the gap between the two gratings.

AB - One of the recent applications of the moiré interferometric technique is in mask alignment for lithography. Usually it is necessary to use reflection moiré systems for alignment. We have analysed theoretically and experimentally the behaviour of moiré signals in reflection, as well as in transmission, with the gap as parameter. A periodic variation of the contrast of the moiré signals was observed when the gap was varied within the Fresnel region. The moiré signals were found to be superimposed on a background which varies with the gap. This variation of background was different for reflection and transmission. However, in both cases the alignment signal itself in the alignment method we are proposing, is independent of small variations in the gap between the two gratings.

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JO - Optics Communications

JF - Optics Communications

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Moiré signals in reflection

Abstract

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