Molecular dynamics simulation of AlN thin films under nanoindentation

Chemistry

• Amorphization 8%
• Amorphous Structure 8%
• Analytical Method 8%
• Atom 16%
• Dislocation 100%
• Dislocation Loop 8%
• Drop 16%
• Expansion 16%
• Force 8%
• Linear Dislocation 8%
• Phase Transition 16%
• Procedure 8%
• Stacking Fault 8%

Physics

• Atoms 16%
• Crystal Defect 8%
• Deformation 8%
• Events 8%
• Expansion 16%
• Molecular Dynamics 33%
• Nanoindentation 25%
• Phase Transition 16%
• Thin Films 25%
• Wurtzite 8%

Material Science

• Aluminum Nitride 33%
• Amorphization 8%
• Expansion 16%
• Indentation 16%
• Nucleation 50%
• Stacking Fault 8%
• Thin Films 25%