TY - GEN
T1 - Monocrystalline PMNN-PZT thin film ultrasonic rangefinder with 2 meter range at 1 volt drive
AU - Zhou, Zhen
AU - Yoshida, Shinya
AU - Tanaka, Shuji
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/26
Y1 - 2017/7/26
N2 - In this study, we successfully developed a high signal-to-noise ratio (SNR) rangefinder based on a piezoelectric micromachined ultrasonic transducer (pMUT). A monocrystalline Pb(Mn1/3, Nb2/3)O3-Pb(Zr, Ti)O3 (PMnN-PZT) thin film was used because it has large figures-of-merit (FOM) for SNR due to its high piezoelectric coefficient and small relative permittivity (typical values: e31,f = -14 C/m2, ϵr = 200∼300). The rangefinding ability of the monocrystalline PMnN-PZT pMUT was evaluated using a pair of the devices as transmitter and receiver. The maximum range was estimated to be over 2 m at a low actuating voltage of 1 Vp-p, when 12 dB was set as the threshold SNR for reliable rangefinding. The energy consumption of the transmitter was as small as ∼55 pJ for the generation of an ultrasonic burst. This performance is suitable for rangefinding applications in consumer electronics.
AB - In this study, we successfully developed a high signal-to-noise ratio (SNR) rangefinder based on a piezoelectric micromachined ultrasonic transducer (pMUT). A monocrystalline Pb(Mn1/3, Nb2/3)O3-Pb(Zr, Ti)O3 (PMnN-PZT) thin film was used because it has large figures-of-merit (FOM) for SNR due to its high piezoelectric coefficient and small relative permittivity (typical values: e31,f = -14 C/m2, ϵr = 200∼300). The rangefinding ability of the monocrystalline PMnN-PZT pMUT was evaluated using a pair of the devices as transmitter and receiver. The maximum range was estimated to be over 2 m at a low actuating voltage of 1 Vp-p, when 12 dB was set as the threshold SNR for reliable rangefinding. The energy consumption of the transmitter was as small as ∼55 pJ for the generation of an ultrasonic burst. This performance is suitable for rangefinding applications in consumer electronics.
KW - PMnN-PZT
KW - pMUT
KW - rangefinding
UR - http://www.scopus.com/inward/record.url?scp=85029390362&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85029390362&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2017.7994014
DO - 10.1109/TRANSDUCERS.2017.7994014
M3 - Conference contribution
AN - SCOPUS:85029390362
T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 167
EP - 170
BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Y2 - 18 June 2017 through 22 June 2017
ER -
