Monolithic fabrication of GaN/Si structure for optical MEMS

R. Ito, F. R. Hu, M. Wakui, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


A new light source with a light beam steering mechanism is proposed for Optical MEMS. The propose device is composed of GaN light source and a movable stage. The direction of the light beam emitted from the GaN light source can be changed by the stage with the comb drive actuators. We deposited the GaN films on Si substrate by molecular beam epitaxy (MBE) and fabricated a movable stage by Si micromachining. The displacement of the Si stage was measured to be 50 um at the voltage of 100V and photoluminescence (PL) from the GaN light source was observed while moving the stage.

Original languageEnglish
Title of host publicationSociety for Information Display - 14th International Display Workshops, IDW '07
Number of pages3
Publication statusPublished - 2007
Event14th International Display Workshops, IDW '07 - Sapporo, Japan
Duration: 2007 Dec 52007 Dec 5

Publication series

NameIDW '07 - Proceedings of the 14th International Display Workshops


Conference14th International Display Workshops, IDW '07


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