@inproceedings{bd59aca303bb4400827cc81471562144,
title = "Monolithic phase shifter based on mechanically tunable SAW delay line",
abstract = "This paper presents results of mechanically controlling the phase velocity of surface acoustic waves (SAW) and the application to monolithic phase shifters operating at 0.1∼10 GHz. A phase sensitivity of 2°/V and sensitivity of the phase velocity (Δv/v) of 41×10-6/V have been measured for devices operating at 2.45 GHz. This is 2 orders of magnitude larger than existing SAW-based monolithic phase shifters. The acoustic wavelength being 10.000 times smaller than the free space equivalent together with the large sensitivity lead to a 50∼500 times reduced device area compared to existing phase shifters.",
keywords = "Acoustic RF MEMS, Delay line, Electrostatic tuning, Phase shifter",
author = "Kuypers, {J. H.} and Schmidt, {M. E.} and S. Tanaka and M. Esashi",
year = "2007",
doi = "10.1109/SENSOR.2007.4300096",
language = "English",
isbn = "1424408423",
series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "161--164",
booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",
}