This paper presents the fabrication and characterizations of a PZT actuated monolithic microstage with multi degrees of freedom (DOFs) used for high-precision positioning. The entire device is fabricated in a symmetrically arrangement from a PZT plate with a size of 15×15×0.8 mm 3. Four actuation units with a displacement amplification mechanism are integrated in the structure. They can be driven individually which result in movements of a stage in different directions. The performances of the displacement and the resonant frequencies are simulated using a finite element method (FEM). Simulation results show the possibility of achieving a displacement of 8 μm in x- and y-axes and 10 μm in z-axis under the applied voltage of 100 V. A prototype has been fabricated and evaluated. Comparisons between FEM simulation and experimental results are carried out.
|Journal||Proceedings of SPIE - The International Society for Optical Engineering|
|Publication status||Published - 2006|
|Event||ICO20: MEMS, MOEMS, and NEMS - Changchun, China|
Duration: 2005 Aug 21 → 2005 Aug 26
- Multi dofs
- Precision positioning