Monolithic PZT microstage with multi degrees of freedom for high-precision positioning

H. G. Xu, K. Okamoto, D. Y. Zhang, T. Ono, M. Esashi

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


This paper presents the fabrication and characterizations of a PZT actuated monolithic microstage with multi degrees of freedom (DOFs) used for high-precision positioning. The entire device is fabricated in a symmetrically arrangement from a PZT plate with a size of 15×15×0.8 mm 3. Four actuation units with a displacement amplification mechanism are integrated in the structure. They can be driven individually which result in movements of a stage in different directions. The performances of the displacement and the resonant frequencies are simulated using a finite element method (FEM). Simulation results show the possibility of achieving a displacement of 8 μm in x- and y-axes and 10 μm in z-axis under the applied voltage of 100 V. A prototype has been fabricated and evaluated. Comparisons between FEM simulation and experimental results are carried out.

Original languageEnglish
Article number603205
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2006
EventICO20: MEMS, MOEMS, and NEMS - Changchun, China
Duration: 2005 Aug 212005 Aug 26


  • Microstage
  • Monolithic
  • Multi dofs
  • Precision positioning
  • PZT


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