Morphology and preferred orientation of Y₂O₃ film prepared by high-speed laser CVD

Earth and Planetary Sciences

• Deposition 100%
• Rate 66%
• Laser 66%
• Morphology 50%
• Gas Pressure 33%
• Vapor Deposition 33%
• Preferred Orientation 33%
• High Speed 16%
• Gas Laser 16%
• Condition 16%
• Increasing 16%
• Plasma 16%
• Temperature 16%
• Time 16%
• Substrate 16%
• Cone 16%

Chemistry

• Rate 66%
• Liquid Film 50%
• Structure 50%
• Yttrium Oxide 33%
• Time 16%
• Reaction Temperature 16%

Material Science

• Liquid Films 50%
• Morphology 50%