TY - GEN
T1 - Motion nonlinearity of gimbaled micromirror in omnidirectional scanning for LiDAR application∗
AU - Suzuki, Katsuya
AU - Sasaki, Takashi
AU - Hane, Kazuhiro
N1 - Funding Information:
*Resrach supported by KAKENHI(17H01267).
Publisher Copyright:
© 2020 IEEE.
PY - 2020/9/27
Y1 - 2020/9/27
N2 - Gimbaled MEMS mirror for omnidirectional LiDAR often suffers strong nonlinearity. The motion equations of the mirror are derived analytically. The motion nonlinearity is explained from the interaction between the motions on two axes. Moreover, a structural condition for stable mirror operation is found from the equations. In order to investigate basic characteristics of omnidirectional scanning, a gimbaled micromirror is fabricated by silicon SOI micromachining and tested.
AB - Gimbaled MEMS mirror for omnidirectional LiDAR often suffers strong nonlinearity. The motion equations of the mirror are derived analytically. The motion nonlinearity is explained from the interaction between the motions on two axes. Moreover, a structural condition for stable mirror operation is found from the equations. In order to investigate basic characteristics of omnidirectional scanning, a gimbaled micromirror is fabricated by silicon SOI micromachining and tested.
UR - http://www.scopus.com/inward/record.url?scp=85098492376&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85098492376&partnerID=8YFLogxK
U2 - 10.1109/NEMS50311.2020.9265557
DO - 10.1109/NEMS50311.2020.9265557
M3 - Conference contribution
AN - SCOPUS:85098492376
T3 - 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020
SP - 130
EP - 133
BT - 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020
Y2 - 27 September 2020 through 30 September 2020
ER -